Features

• Quick flow-response, 0.3s (HG200 series)
• 10 million cycle life guarantee
• DeviceNet^TM, RS485/analog, EtherCAT®
• Self-diagnostic/response learning function (HG200 series)

Other Features

• Multi-gas, Multi-range selection
• 9 BIN sizes, enabling control from 10 SCCM to 50 SLM
• High accuracy, ±1% S.P. @10-100% (N₂)
• Wide flow control range, 0.5-100% F.S. (NC type with PCTFE poppet model)
• High valve shut-off performance, 0.1% F.S. (NC type with PCTFE poppet model)
• Wide temperature range 15-50°C
• RoHS / CE compliant
• Pressure Insensitive function (HG200 series)

Electrical Connection

Analog model (9 Pin D-sub) male type (M3 screw)

RS485 model 9Pin D-sub male type (M3 screw)

DeviceNet^TM model CM02-8DR5P-CF (D5) DDK

EtherCAT® model (Power connector) XS3M-M524-201 OMRON

Specification

• ※1. This specification is defined based on our standard test conditions with single MFC. Performance under different conditions may not satisfy this specification, and we do not guarantee this specification under all possible configurations.
• ※2. From 0% to 5%S.P. or greater, ambient temperature is 22°C (Min. 15°C, Max. 32°C)
• ※3. Digital mode, ambient temperature is 22°C±3°C
• ※4. Valve closes if the set point applied is less than 0.5% F.S.
• “SCCM” and “SLM” indicate the gas flow given in mL/min and L/min, at 0°C and 101.3kPa(abs) conditions. F.S.=full scale S.P.=set point

Dimensions

1.125″IGS™ fitting

124mm 1/4″ VCR™ type fitting

HG200 / 201, HC100 / 101, HM100 / 101 series model and suffix codes

Features

• Chilled Tower: A Pioneer in Energy Saving.
• Provides environmentally friendly chilled water at 10°C to 30°C, available year-round.

Supply Temperature Range

Cooling Mechanism

Operation During Low to Medium Temperature Periods (Winter to Intermediate Seasons) 

• During periods of low ambient temperature, the chilled water returning from the load side is sent to the sealed-type air-cooled cooling tower (cooling tower section). Utilizing the outside air drawn in by the fan, the water is cooled to the set temperature.
• By using inverter control for fan speed regulation, the system precisely and stably supplies chilled water at the desired temperature to the load side.

Operation During Medium to High Temperature Periods (Intermediate to Summer Seasons)

• During periods of high ambient temperature, when the cooling tower section alone is insufficient for cooling, the compressors are sequentially operated to cool the water to the set temperature.
• By controlling the number of operating compressors, the system ensures a stable supply of chilled water to the load side.

Operation During High-Temperature Peak Periods (Bypass Operation) 

• When the outside air dry-bulb temperature becomes higher than the chilled water inlet temperature of the chilled tower, passing water through the cooling tower section would cause heat absorption and cooling loss.
• In this case, the system automatically redirects the water directly to the chiller section (bypass operation) to prevent cooling loss and efficiently supply chilled water at the set temperature.

Specification Table

• ※1 Performance values (cooling capacity, chilled water flow rate) are based on an ambient dry-bulb temperature of 35°C.
• ※2 Please adhere to the specified chilled water flow range.
• If the flow rate is too low, it may cause freezing damage or blockages due to sediment buildup.
• If the flow rate is too high, it may lead to corrosion due to excessive velocity.
• ※3 Depending on the model, submission of a high-pressure gas manufacturing report may be required under the High-Pressure Gas Safety Act.
• ※4 Electrical characteristics (power consumption, operating current) are based on the following conditions:
• Ambient dry-bulb temperature: 35°C
• Inlet temperature: 35°C
• Outlet temperature: 25°C
• Additionally, to account for usage variations, transformer capacity and wiring capacity should be at least 1.2 times the power consumption and operating current.
• ※5 The control circuit operates at AC 200V 50/60Hz.
• ※6 Noise levels are measured in an environment with minimal surrounding reflections (A-scale).
• In actual installation conditions, noise levels may vary by approximately ±3 dB(A) due to surrounding noise and reflections.
• ◆ The specifications in this document are subject to change without notice.
  For inquiries, please contact our sales department to create a delivery specification sheet tailored to your usage conditions.

Option

If you request an option, it must be specified at the time of ordering the main unit as a general rule.

Features

Supply Temperature Range

The supply temperature refers to the chilled water outlet temperature of the Chilled Tower.

Main Applications

① Cooling for Production Equipment 

• Laser oscillators
• Electric diffusion furnaces
• Sputtering equipment
• Ultrasonic cleaning machines
• Electron microscopes
• Precision polishing machines
• High-frequency induction furnaces
• Various electric furnaces
• Paper rolls
• Flour milling rolls
• Die-casting molds
• Electric automatic welding machines
• Reaction towers
• Wastewater temperature pollution prevention
• Cooling equipment for paint tanks

② Air Conditioning (Year-Round Cooling) 

• Data centers
• Clean rooms
• Factory air conditioning

③ Cooling for Research Facility Equipment 

• Laser oscillators
• Various research equipment

Structural Diagram

Standard Component Materials

Specifications

• ※1 → “Performance (cooling capacity, chilled water flow rate) values are based on an outside air wet-bulb temperature of 27°C.”
• ※2 → “Please adhere to the specified chilled water flow range. If the flow rate is too low, it may lead to damage due to freezing or clogging from accumulated contaminants. If the flow rate is too high, it may cause corrosion due to excessive flow velocity.”
• ※3 → “If required by the High-Pressure Gas Safety Act, a notification for high-pressure gas production must be submitted to the prefectural governor.”
• ※4 → “The spray water supply volume is based on conditions of an outside air wet-bulb temperature of 27°C, an inlet temperature of 35°C, and an outlet temperature of 25°C (with a concentration ratio of four during blowdown).”

• ※5 … The electrical characteristics (power consumption, operating current) indicate values under the conditions of an ambient wet-bulb temperature of 27°C, an inlet temperature of 35°C, and an outlet temperature of 25°C. Additionally, the transformer capacity and wiring capacity should be at least 1.2 times the power consumption and operating current to account for variations in operating conditions.
• ※6 … The noise level represents the measured value (A-scale) in a non-reverberant environment. In actual installation conditions, surrounding noise and reflections may cause variations of approximately ±3 dB(A).

Figure A

Note: Please ensure a clearance of at least 1.5 meters around the entire perimeter for service space.

Figure B

Note: Please ensure a clearance of at least 1.5 meters around the entire perimeter for service space.

Specification

• ※1 Performance (Cooling capacity, Chilled water flow rate). The values are based on a dry-bulb ambient temperature of 35°C.
• ※2 High-Pressure Gas Safety Act Applicable Classification. No high-pressure gas manufacturing notification is required under the regulations of the High-Pressure Gas Safety Act.
• ※3 Refrigerant Charge Amount. The specified amount is based on standard specifications. Additional charging may be necessary under certain design conditions to ensure performance. (The final charge amount is indicated on the nameplate.)
• ※4 Electrical Characteristics (Power Consumption, Operating Current). The values are based on conditions of 35°C dry-bulb temperature, 35°C chilled water inlet temperature, and 25°C chilled water outlet temperature. Transformer capacity and wiring capacity should be at least 1.2 times the indicated power consumption and operating current.
• ※5 Internal Control Circuit. Operates on DC24V (Some models support DC12V, DC5V).
• ※6 Noise Value (Measured at a Distance of 2m and Height of 1.5m). The stated value represents the measurement in an environment without reflective surfaces (A-weighted sound scale).. In actual installation conditions, the surrounding environment may cause variations of approximately ±3 dB(A). During summer, to protect the equipment, the upper rotation speed of the blower fan may temporarily increase, which can result in higher noise levels.

Outline Drawing

Foundation Reference Drawing

Performance Curve Diagram

Internal Pressure Loss

Water Supply Temperature and Operating Range

Electrical Wiring

AC 3-Phase 200V (50/60Hz)

• 1.The values for power consumption and operating current are based on the conditions of 35°C ambient dry-bulb temperature, 35°C chilled water inlet temperature, and 25°C chilled water outlet temperature. Power consumption and operating current may vary depending on operating conditions.
• 2. If the voltage drop exceeds 2% over the maximum wiring length, the internal wiring regulations require increasing the wire thickness.
• 3.The minimum wire thickness applies to metal conduits (wire), synthetic resin conduits, floor ducts, and cable wiring. For metal conduits and synthetic resin conduits, the specification is based on three wires housed within the same conduit.

Options

Optional accessories are available for installation at the time of order. Please contact our sales department for more details.

• Support for Different Voltages
• Modular Controller
• Corrosion-Resistant Specification (Salt Protection)
• Public Building Construction Specification
• External Pump Unit Specification
• Vibration Isolation Stand
• Snow Protection Hood
• Interlinked Snow Protection Hood
• Protective Mesh (Net)
• Strainer

⚠ Safety Precautions

• Regarding the Use of the Chiller Tower The chiller towers listed in this catalog are for general industrial use.
• Before Use Please read the instruction manual carefully before use and operate the unit correctly.
• Regarding Installation Installation should be performed by a qualified professional. Improper installation may result in water leakage, electric shock, or fire hazards.
• Regarding Installation Location Do not install the unit in locations where flammable gases may leak or where ignitable materials are present. Avoid areas where flammable gases may be generated, accumulate, or stagnate, and areas where carbon fibers or metal dust are floating, as they pose risks of fire or explosion.

Features

• Pressure-based flow measurement architecture
• Improved Pressure Insensitive function
• Valiant repeatability
• Self-diagnostic function

Electrical Connection

Analog model 9 Pin D-sub male type (M3 screw) 

RS-485 model 9 Pin D-sub male type (M3 screw) 

DeviceNet™ model CM02-8DR5P-CF (D5) DDK 

EtherCAT® model (Power connector) XS3M-M524-201 OMRON 

EtherCAT® model (Communication connector) Cat.5 RJ45 Ethernet connector 

Dimensions

• 1.125” IGS™ fitting

Specifications ※ 1

• ※1. This specification is defined based on our standard test condition with single MFC. The performance with the different condition may not satisfy
  this specification, and we do not guarantee this specification under the condition with all combination of the configuration.
• ※2. From 0% to 5%S.P. or greater, ambient temperature is 22ºC (Min. 15ºC, Max. 50ºC)
• ※3. Digital mode, ambient temperature is 22ºC (Min. 15ºC, Max. 50ºC, Only when the temperature changes within ±3°C
  after zero point adjustment is performed in the ambient temperature.)
• ※4. Valve closes if the set point applies less than 0.5%F.S.
  SCCM, SLM are the unit indicates the gas flow-rate as mL/min, L/min at 0ºC, 101.3kPa (abs) condition.
  F.S. = full scale, S.P. = set point

PS200 series model and the suffix codes

Table of Models and Functions

1480G1 / 2480G1 series

• For both the 1.5″ and 1.125″IGS™, PI Mass Flow Controllers

Dimensions

• *1: The specifications above are guaranteed values when the MFC was measured by itself in standard conditions. The MFC may not meet the specifications above,
  depending on the measurement conditions.
• *2: The 147*G1 / 247*G1 series are also available for use with minute pressure differences. Please inquire separately for the specifications of our minute pressure
  difference models.
• *3: A model using a rubber seal is also available. Please inquire separately about the rubber seal specifications.
• *4: The PI function may not perform as specified in certain plumbing conditions.

1480G1-D / 2480G1-D series

DeviceNet™ communication type For both the 1.5″ and 1.125″IGS™, PI Mass Flow Controllers

Dimensions

• *1: The specifications above are guaranteed values when the MFC was measured by itself in our standard conditions. The MFC may not meet the specifications above, depending on the
  measurement conditions.
• *2: The 147*G1-D / 247*G1-D series are also available for use with minute pressure differences. Please inquire separately for the specifications of our minute pressure difference
  models.
• *3: For details about DeviceNet™ communication, see page 10.
• *4: A model using a rubber seal is also available. Please inquire separately about the rubber seal specifications.
• *5: The PI function may not perform its specifications depending on each plumbing condition.

SFC1480FX / SFC2480FX series

• For both the 1.5″ and 1.125″IGS™, MG/MR Mass Flow Controllers

Dimensions

• *1: The specifications above are guaranteed values when the MFC was measured by itself in standard conditions. The MFC may not meet the specifications above, depending on the
  measurement conditions.
• *2: The SFC147*FX/SFC247*FX are also available for use with minute pressure differences. Please inquire separately for the specifications of our minute pressure difference models.
• *3: A model using a rubber seal is also available. Please inquire separately about the rubber seal specifications.

SFC1480FX-D / SFC2480FX-D series

• DeviceNet™ communication type For both the 1.5″ and 1.125″IGSTM MG/MR Mass Flow Controllers

Dimensions

• *1: The specifications above are guaranteed values when the MFC was measured by itself in standard conditions. The MFC may not meet the specifications above, depending on the
  measurement conditions.
• *2: The SFC147*FX/SFC247*FX are also available for use with minute pressure differences. Please inquire separately for the specifications of our minute pressure difference models.
• *3: For information about DeviceNet™ communication, see page 6.
• *4: A model using a rubber seal is also available. Please inquire separately about the rubber seal specifications

Features

• Multi-gas, multi-range selection
• Fast response
• All-metal seals
• Field programmable*
• Device Net^TM, RS-485, or analog control
• Multiple alarm and diagnostic capabilities
• RoHS compliant

Benefits

• Outstanding accuracy, repeatability, and stability
• Superior reliability
• Comprehensive communication and control
• Easy integration
• Substantial cost savings
• World-class service and support

Specifications

• Note: For full model and suffix code information, see Model and Suffix Codes on next page. Specifications are subject to change without notice.

Model and Suffix Codes

■ Mass Flow Controllers

• ※1 Three-digit flow range suffix codes are for DN Series models; Three-digit and four-digit flow range suffix codes are for available for PA Series models. Consult factory for details.
• ※2 Electronic options “T” and “Y” are available only for compact 785 and 786 Series.

■ Mass Flow Meters

• ※1 Three-digit flow range suffix codes are for DN Series models; Three-digit and four-digit flow range suffix codes are for available for PA Series models. Consult factory for details.
• ※2 Electronic options “T” and “Y” are available only for compact 865 and 866 Series.

Electrical Connections

Dimensions

■ Models with VCR^TM Compatible Fittings

■ Models with IGS^TM Compatible Fittings

Features

• Corrosion-resistant design
• Metal seals
• VCR^TM compatible connections
• Full-scale flow ranges from 10 SCCM to 50 SLM
• Normally-closed or normally-open solenoid control valve
• Leak integrity of 1×10^-10 atm-cc/s of He

Benefits

• Fast response— ≤ 1 s flow-settling time
• Outstanding reliability
• Easy integration—standard connectors and dimensions
• Superior results—high-quality thin-film characteristics

Specifications

• ※1: Less than ±1% for Full Scale Flow greater than 20SLM
• ※2: Normally open valve model
• [20SLM < N2 density flow ≤ 30SLM] 147 to 275kPaD
• [30SLM < N2 density flow ≤ 50SLM] 196 to 275kPaD
• Normally close valve model
• [20SLM < N2 density flow ≤ 50SLM] 147 to 275kPaD
• These specifications are valid only in lab conditions used in factory testing, with standard configuration.

• Fluoro Rubber or Chloroprene Rubber is when N2 density flow is 11.096 SLM or greater, and also depending on the gas.

Electrical Connections

• Connection to +15V OPEN, Connection to -15V : CLOSE (Normally closed valve model)
• Connection to +15V CLOSE, Connection to -15V : OPEN (Normally open valve model)

Model and Suffix Codes

Dimensions

Features

• Elastomer seals
• VCR^TM and Swagelok^TM compatible connections
• Full-scale flow ranges from 10 SCCM to 50 SLM
• Normally-closed or normally-open solenoid control valve
• Leak integrity of 1×10-6 atm-cc/s of He

Benefits

• Fast response— ≤ 2 s flow-settling time
• Easy integration—standard connectors and dimensions

Specifications

• ※1: Less than ±1% for Full Scale Flow greater than 30SLM
• ※2: N/O: Normally Open Valve Model
• ※3: N/C: Normally Closed Valve Model [20 SLM < N2 density flow ≤ 50 SLM: 147 to 275 kPaD]
• These specifications are valid only in lab conditions used in factory testing, with standard configuration.

• Fluoro Rubber or Chloroprene Rubber is used when N2 density flow is 11.096 SLM or greater with normally open valve models.
• Material used also depends on the applied gas. Contact factory for information on what material is used.
• Fluoro Rubber or Chloroprene Rubber is used when N2 density flow is 551 SCCM or greater with normally closed valve models.
• Materials used also depends on the gas.

Electrical Connections

• Connection to +15V OPEN, Connection to -15V : CLOSE (Normally closed valve model)
• Connection to +15V CLOSE, Connection to -15V : OPEN (Normally open valve model)

Model and Suffix Codes

Dimensions

Features

• Various line-up of Black and Galvanized Pipe Fittings

Basic Specifications

• Nominal Class : 150 LB and 300 LB
• Material : Black Heart Malleable Iron
• Available Threads : ISO Taper thread or Parallel thread, ANSI Taper thread

Features

• We have an extended portfolio of valves including Malleable valves.
• Their materials include stainless, cast and forged steels and polyethylene.
• Automatic operated valves are also available.
• Our valves are widely used in manufacturing plants and construction equipment.

Product Introduction

■Material

• Malleable / Ductile valve iron (FCMB35-10,FCD-S)
• Stainless Steel (SCS13A,14A,16A)
• Cast Steel (WCB)
• Forged steel (A105,F304 etc.)
• Polyethylene (PE80)

■Category

• For general piping line
• For building Equipment
• For industrial and environmental plant
• For gas equipment