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- Chiyoda Seiki EX-100-TD Excellent For Corrosive Gas, Inner Surface Special Coating (Primary pressure: 20.0 MPa or less/adjustment pressure 0.1 to 1.0 MPa, maximum flow rate: 50 ℓ, 150 ℓ/min・Air)
Chiyoda Seiki, Japan
Chiyoda Seiki EX-100-TD Excellent For Corrosive Gas, Inner Surface Special Coating (Primary pressure: 20.0 MPa or less/adjustment pressure 0.1 to 1.0 MPa, maximum flow rate: 50 ℓ, 150 ℓ/min・Air)
Made in Japan
Manufacturer: Chiyoda Seiki
Model: EX-100-TD
Features
The design adopts an integrated valve and diaphragm type (tie diaphragm).
The parts of the gas contacting are made from SUS316 and undergo special corrosion-resistant surface treatment.
Super-secret structure with He leakage (external leakage) of 1×10-9Pa-m3/sec or less.
Prevents gas leakage from external blowout in the event of diaphragm breakage.
Specifications
| Model | EX-20-TD | EX-100-TD |
| Certified Product | MR-EX-20-TD | MR-EX-100-TD |
| Specification | G1 | G1 |
| Suitable Use Gas | Ultra-pure Toxic/corrosive | Ultra-pure, toxic, corrosive |
| Body | SUS316 | SUS316 |
| Material Diaphragm | SUS316 | SUS316 |
| Second-rate Pressure For | Below 20.0MPa | |
| Adjustment Pressure | 0.1~1.0MPa | |
| Standard Flow | 0~202/min (standard state) | 0-100g/min (standard state) |
| Maximum Flow | 502/min (standard state) | 150g/min (standard state) |
| Maximum CV Value | 0.05 | |
| Operating Temperature | -10~+60°C | |
| Dew Point Temperature | Below -70°C | |
| He External Value | Below 1X10Pa•m/sec | |
| Dary Pressure Gauge Con | G1/4 | G1/4 |
| Entrance Pure | VCR 1/4 welded structure also strong, mouth 1/4 welded structure | |
| Export Mirror | VCR 1/4 welded structure, Tianmen mouth 1/4 welded structure | |
| Mouth | none | |
| Death | none | |
| Quality | 1,2 kg | 1,3 kg |
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