Manufacturer: Nok.
Model: SUPER SVN.

Features

• Since it is a grease that generates very little outgassing, it is possible to maintain a stable vacuum environment at the target vacuum level, and manufacturing defects caused by outgassing and particles can be reduced.
• Since the base oil is a grease with very low vapor pressure, it can evaporate less even in a high vacuum environment, and wafer contamination can be suppressed.
• Since it is a grease with a very low oil release degree, the base oil scattering is reduced, and the contamination of the wafer due to the scattering of the base oil can be suppressed.