Kosaka Laboratory Ltd.
Kosaka Laboratory ET4000
Manufacturer: Kosaka Laboratory Ltd.
Model: ET4000
Features
- Excellent in accuracy, stability and functionality, ET4000 is a fully automatic, most appropriate for measurement of micro figure, step height and roughness of FPD, wafers, hard disks, and other nano-order application.
- ET4000 series can be selected from a number of models according to applications.
- ET4000A: Multifunctional and automatic
- ET4000L: Fully automatic, compatible with large precision glass or wafer size sample
- ET4000M: Reasonable, high performance and general-use
Specification
| Max. sample size | 210 × 210 mm to 300 × 400 mm |
|---|---|
| Repeatability | 1 σ within 0.5 nm |
| Measuring range | Z: 100 μm X: 100 mm (Y stroke: 150 to 400 mm) |
| Resolution | Z: 0.1 nm X: 0.01 μm |
| Measuring force | 0.5 μN to 500 μN |
