Kosaka Laboratory Ltd.
Kosaka Laboratory EC1650H
Manufacturer: Kosaka Laboratory Ltd.
Model: EC1650H
Features
- EC1650H furnish full of ingenuity for measuring with “high accuracy and quickly”. EC1650 is economy.
- High resolution
- 2CR normal type, 2CR phase correct and Gauss filter supplied
Specification
| Mechanism / system | Porous static pressure air bearing system / table rotation type |
|---|---|
| Rotation accuracy | (0.02 + 0.0004H) μm H: height from table surface (mm) |
| Max. measuring diameter | φ368 mm both inner and outer diameters |
| Loading capacity | 25 kg |
| Z traverse range | 300 mm (at the use of b-type stylus arm) * In case of EC 1650 |
