SHINKO SEIKI CO.
Shinko Seiki EXAM Plasma Etching Unit

Manufacturer: Shinko Seiki Co., Ltd.
Model: EXAM
Features
- Batch type plasma etching unit with 250 × 250 mm processing stage.
- This unit can etch quartz as well as silicone, oxide film, and nitride film.

Related Products
-

Shinko Seiki STM Series Multi-Chamber Sputtering System
-

Shinko Seiki Vacuum Annealing Oven
-

Shinko Seiki AMF Series Vapor Deposition Unit For Research And Development
-

Shinko Seiki STM Series Ultra-High Vacuum Sputtering System
-

Shinko Seiki Oil Sealed Rotary Vacuum Pumps
-

Shinko Seiki Vacuum Baking Oven





