Shinko Seiki SERIO ICP Plasma Etching Unit

Manufacturer: Shinko Seiki Co., Ltd.
Model: SERIO

Features

  • SERIO is a high-density plasma etching unit that renders smoothly etched surfaces by using a high-density ICP plasma source.
  • It features excellent etching angle controllability that lends itself well to fabricating nano-imprint molds.

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