Osaka Vacuum
Osaka TGkine2200M-R Turbo Molecular Pumps
Manufacturer: Osaka Vacuum, Ltd.
Model: TGkine2200M-R
Features
- Energy-saving design
- A memory function in pump body is equpped to store operation data, setting parameter, abnormal history, and so on.
- ※All the data can be transferred even if the controller is replaced during an overhaul.
- Various communication interfaces EtherCAT compatible
- International standard CE/NRTL/SEMI-S2 certified
Specifications
| Model*1 | TGkine2200M-R | TGkine2204M-R | TGkine2205M-R |
|---|---|---|---|
| Inlet flange | ISO-B250 / VG250 | ||
| Outlet flange*2 | KF40 | KF50 | |
| Volume flow rate | |||
| N₂ (L/s) | 2200 | ||
| N₂ (with protective screen; L/s) | 2100 | ||
| H₂ (L/s) | 1800 | ||
| Max. compression ratio | |||
| N₂ | >2×108 | ||
| H₂ | 3×103 | ||
| Max. throughput*3 *4 | |||
| N₂ (sccm) | 7000 | ||
| Ar (sccm) | 3000 | ||
| Base pressure*5 | |||
| (Pa) | <2×10-7 | ||
| (Torr) | <1.5×10-6 | ||
| Startup / Shutdown | |||
| Startup time (min) | ≤10 | ||
| Shutdown time (min) | ≤10 | ||
| Max. backing pressure*6 | |||
| (Pa) | 220 | ||
| (Torr) | 1.65 | ||
| Recommended backing pump (L/min) | ≥2000 | ||
| Mounting orientation | Any | ||
| Weight (kg) | 59 | ||
- *1 Please contact us for the specific model name.
*2 Specifications may vary depending upon the model.
*3 1 Pa·L/s (25 °C) = 0.543 sccm (0 °C, 1 atm).
*4 When the pump is backed by a 5000 L/min backing pump.
*5 Pressure attained after 48 hours of bake-out.
*6 Max. foreline pressure in which the pump can continue to run without triggering the fail-safe acceleration-shutdown feature.
*7 TGkine1700M-R is also available upon request.
Dimensions
