Osaka Vacuum
Osaka TS50 Turbo Molecular Pumps
Manufacturer: Osaka Vacuum, Ltd.
Model: TS50
Features
- All helical groove stage type rotor
- High gas throughput at medium to low vacuum
- Durable structure against more than 300,000 times of air inrush
- Conformance to safety standards: NRTL / SEMI-S2
Specifications
| Inlet flange | VG100 CF100 ISO-R100 | |
| Volume flow rate | N2 (L/s) | 25 |
| N2 (with protective screen) (L/s) | 23 | |
| H2 (L/s) | 13 | |
| Max. compression ratio | N2 | 2×106 |
| H2 | 50 | |
| Max. throughput *1, *2 | N2 (sccm) | 600 |
| Startup time | (min) | 2.5～3.5 |
| Shutdown time | (min) | 2.5～5 |
| Base pressure *3 | (Pa) | < 1×10-4 |
| (Torr) | < 7.5×10-7 | |
| Max. backing pressure | (Pa) | 1200 |
| (Torr) | 9 | |
| Recommended backing pump | (L/min) | ≧80 |
| Orientation | Vertical (±10°) | |
| Weight | (kg) | 11 |
*1: 1Pa・L/s(25℃)=0.543sccm(0℃, 1atm)
*2: When using a 160L/min backing pump
*3: Pressure attained after 48 hours of bake-out.
Dimensions
| Ⓐ | Ⓑ | Ⓒ | Ⓓ | Ⓔ | Ⓕ | Ⓖ | Ⓗ |
| VG100 | φ185 | 15 | 264 | 185 | 238 | 226 | 215 |
| CF100 | φ152 | 21 | 264 | 185 | 236 | 226 | 215 |
| ISO-R100 | φ130 | 12 | 262 | 183 | 234 | 224 | 213 |
・All bolt holes of the inlet flanges straddle the centerlines.
* Reprinting is prohibited without permission. Contents are subject to change without notice.
