KOGANEI CORPORATION
Koganei Electric Bellows Pump F-EPB Series
Manufacturer: KOGANEI CORPORATION
Features
The liquid contact area uses Teflon, and this material supports safe handling of a wide range of liquid chemicals. As a result, the system maintains strong chemical resistance and consistent performance over extended operation. In addition, the bellows method removes any sliding portion, so particle generation during operation becomes almost nonexistent. Therefore, the process stays clean and suitable for high purity applications.
Moreover, the system allows simple and precise control of dispensing volume and dispensing speed. By operating a stepping motor, users achieve accurate digital control, which improves repeatability and process stability. Consequently, this design enhances efficiency, reduces adjustment time, and supports reliable dispensing in demanding production environments.
Specifications
| Model | F-EPB08-4W | F-EPB15-3W | F-EPB40-1W |
| Media | Photoresist solution, pure water, chemical solution (flammable substances not allowed) | ||
| Maximum dispensing volume | 8 mL | 15 mL | 40 mL |
| Maximum dispensing pressure | 0.2 MPa | ||
| Dispensing flow rate | 0.1–4 mL/s | 0.1–10 mL/s | |
| Suction flow rate | 0.1–4 mL/s | 0.1–10 mL/s | |
| Maximum viscosity of media | 200 cP | 100 cP | |
| Repeatability of dispensing volume | ±1% F.S. | ||
| Proof pressure | 0.3 MPa | ||
| Mass | 3.1 kg | 3.1 kg | 3.6 kg |
