KOGANEI CORPORATION
Koganei Electric CT/PT/HT Pump for FPD Processes F-EPT, F-EPP, F-EPH Series
Manufacturer: KOGANEI CORPORATION
Features
The tube diaphragm structure delivers proven performance and high reliability, and it uses Koganei’s unique eight shaped cross section combined with a trefoil tube diaphragm. As a result, the design eliminates sliding portions in the liquid chemical dispensing area, so particle generation stays significantly lower than with syringe type pumps. Therefore, the system supports cleaner and more stable chemical dispensing.
Moreover, mounting an AC servo motor greatly improves flow rate control performance. In addition to high repeatability in dispensing volume, the pump now enables smooth liquid chemical dispensing without pulsation. Furthermore, the AC servo motor allows precise control of dispensing speed, so the system can synchronize with substrate movement and expand overall controllability.
At the same time, the pump capacity lineup supports a wide range of substrate sizes. Users can select from maximum dispensing volumes of 30, 60, 100, 200, or 300 milliliters according to application requirements. Consequently, this flexible lineup covers both small and large substrates while maintaining consistent performance a
Specifications
| Model | F-EPT30 | F-EPT60 | F-EPT100 | F-EPT200 | F-EPT300 |
| Media | Photoresist solution, pure water, chemical solution (flammable substances not allowed) | ||||
| Dispensing volume | 3–30 mL | 6–60 mL | 10–100 mL | 20–200 mL | 30–300 mL |
| Maximum dispensing pressure | 0.05 MPa | ||||
| Allowable maximum vacuum pressure | −0.02 MPa | ||||
| Dispensing flow rate | 0.05–10 | 0.05–15 | 0.05–25 | 0.1–25 | 0.1–60 |
| Suction flow rate | 0.05–10 | 0.05–15 | 0.05–25 | 0.1–25 | 0.1–60 |
| Proof pressure | 0.1 MPa | 0.15 MPa | |||
| Mass | 9.5 kg | 14.2 kg | 14.2 kg | 28.6 kg | 32 kg |
| Model | F-EPP200 | F-EPP300 | F-EPH200 | F-EPH300 |
| Media | Photoresist solution, pure water, chemical solution (flammable substances not allowed) | |||
| Dispensing volume | 20–200 mL | 30–300 mL | 20–200 mL | 30–300 mL |
| Maximum dispensing pressure | 0.05 MPa | 0.07 MPa | 0.1 MPa | 0.1 MPa |
| Allowable maximum vacuum pressure | −0.02 MPa | |||
| Dispensing flow rate | 0.5–20 | 0.5–30 | 0.5–20 | 0.05–20 |
| Suction flow rate | 0.5–20 | 0.5–30 | 0.5–20 | 0.05–20 |
| Proof pressure | 0.1 MPa | 0.15 MPa | ||
| Mass | 27.4 kg | 29.3 kg | 27.5 kg | 32 kg |
