Manufacturer: Sakaguchi Electric Heaters CO., LTD.

Features

• φ12.5mm wafer (sheet-fed processing)
• Compact housing (approx. 30 cm wide)
• No cleanroom required
• Low power consumption (rated AC100V 10A)
• Ultra-high vacuum (5 × 10 -5 Pa or less)
• Rapid temperature rise and fall (2.5 seconds to 1100°C)
• Stable temperature control (1100°C±0.5°C)
• Uniform temperature distribution (variable (σ/Ave.) 0.5%)