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YASKAWA MECHATREC SUEMATSU KYUKI CORP.
YASKAWA SEMISTAR-GEKKOVD31HDA Clean Robot For Handling Semiconductor Wafers And Glass Substrates
Manufacturer: YASKAWA MECHATREC SUEMATSU KYUKI CORP.
Model: SEMISTAR-GEKKOVD31HDA
A clean robot for wafer handling that embodies the ideal of being fast and damage-free.
Purpose of use: Transport
Product Description
A vacuum direct-drive motor and a steel belt enable low-contamination, high-speed wafer transport.
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