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YASKAWA MECHATREC SUEMATSU KYUKI CORP.
YASKAWA SEMISTAR-VD35D-G4A Clean Robot For Handling Semiconductor Wafers And Glass Substrates
Manufacturer: YASKAWA MECHATREC SUEMATSU KYUKI CORP.
Model: SEMISTAR-VD35D-G4A
A clean robot for wafer handling that embodies the ideal of being fast and damage-free.
Purpose of use: Transport
Product Description
The robot supports glass substrates up to the fourth-generation class of 730 × 920 mm. Moreover, a link mechanism strengthens the arm and improves rigidity. In addition, eliminating the vacuum belt drive reduces gas emissions. Furthermore, engineers can integrate the substrate presence sensor wiring directly into the arm.
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