- Home
- Products
- YASKAWA SEMISTAR-VD35D-G4A Clean Robot For Handling Semiconductor Wafers And Glass Substrates
YASKAWA MECHATREC SUEMATSU KYUKI CORP.
YASKAWA SEMISTAR-VD35D-G4A Clean Robot For Handling Semiconductor Wafers And Glass Substrates
Manufacturer: YASKAWA MECHATREC SUEMATSU KYUKI CORP.
Model: SEMISTAR-VD35D-G4A
A clean robot for wafer handling that embodies the ideal of being fast and damage-free.
Purpose of use: Transport
Product Description
The robot supports glass substrates up to the fourth-generation class of 730 × 920 mm. Moreover, a link mechanism strengthens the arm and improves rigidity. In addition, eliminating the vacuum belt drive reduces gas emissions. Furthermore, engineers can integrate the substrate presence sensor wiring directly into the arm.
Related Products
-

Yaskawa SRP-MLIII-6 Slip Ring For MECHATROLINK-III Signal Converter
-

YASKAWA MOTOMAN-SP225H-135 Spot Welding Robot
-

YASKAWA MOTOMAN-SDA10D Or 10F Handling (7-Axis Or Dual-Arm) Robot
-

Yaskawa GP4000 Programmable Display
-

YASKAWA MOTOMAN-HC30PL (Dustproof And Splashproof Specifications) Human-Assisted Collaborative Robots
-

Yaskawa Airsonic L-35C-02 Machining Robots Vertical Articulated Robot And Pneumatic Die Grinder





