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YASKAWA MECHATREC SUEMATSU KYUKI CORP.
YASKAWA SEMISTAR-VD95D Clean Robot For Handling Semiconductor Wafers And Glass Substrates
Manufacturer: YASKAWA MECHATREC SUEMATSU KYUKI CORP.
Model: SEMISTAR-VD95D
A clean robot for wafer handling that embodies the ideal of being fast and damage-free.
Purpose of use: Transport
Product Description
The robot supports glass substrates up to the fourth-generation class of 730 × 920 mm. Moreover, the arm’s link mechanism increases rigidity. In addition, the design eliminates the vacuum belt drive and reduces gas emissions. Furthermore, the arm accommodates the wiring for the substrate presence sensor.
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