Manufacturer: Nissan Tanaka
Model: TORR-30

Low-pressure, standard model for the primary side low-pressure use: TORR-30

Features

• The TORR series is a pressure regulator that can be considered synonymous with “pressure regulators for semiconductor gases” thanks to its long track record and high reliability.
• Assembly is carried out in a clean room of class 1000, ensuring a cleanliness level of 0.3μm or better.
• We have integrated filters into the flow path of the primary chamber to reduce internal leaks.
• We conduct shipment inspections on all units, including helium leak testing.
• We can also produce electrolytic polishing specification products (surface roughness of the metal parts for gas connection: Ra0.25μm).
• The TORR-30 series is a standard model for low-pressure applications and can be widely used in facilities after decompression, such as valve boxes and indoor piping installation.

Basic Specifications

Use materials
Gas connection part
Main body: SUS316L
Diaphragm: SUS316L
Filter: SUS316L
Pressure Gauge: SUS316L (Screw-type connection)
Joint or fitting: SUS316L (Welded connection)
Other gas contact parts: SUS316L, SUS316, Fluororesin
Non-contact gas part
Cap: C3771
Pressure regulating handle: ABS plastic, C3604

Performance
Inlet side maximum working pressure: 5MPa
Outlet side maximum working pressure: 1.0MPa
Maximum flow rate: 300L/min(nor)（P1=10MPa, P2=0.6MPa, N₂ GAS）
Operating temperature: -5～40℃
Weight: 1.1kg
Built-in filter filtration degree: 20μm
Diameter of inlet and outlet ports: 1/4″
External leak amount: 1.3×10^-9Pa・m3/sec below (Screw-type connection) & 1.3×10^-10Pa・m3/sec below (Welded connection)

Flow Characteristics Diagram

Appearance

Description

Designated Attention

※1 If you select the 4-port specification, please select the symbol for the primary side pressure gauge from the following and replace the product name assembly with A0.

※2 In the ‘SH’ series, which uses a Ni-Cr-Mo alloy of high corrosion-resistant alloy for the metal parts connected to the gas, it cannot be supported. The Ni-Cr-Mo alloy is equivalent to the ‘Hastelloy C-22’ of the American Haynes company.
※3 In the case without a secondary side pressure gauge, the symbols for each usage pressure are as follows:

※4 You can only select fitting type S (Swagelok).
※5 Different symbols will apply for other shapes.
※6 Using italic fittings requires essentially a welded connection, whereas for other types of fittings, you will essentially have a threaded connection.
※7 You can select only fitting types S (Swagelok) and F (Finelok).
※8 Even when using “SH”, the gas contact metal part of the pressure gauge will be SUS316L. Please contact us if you desire a pressure gauge that uses Ni-Cr-Mo alloy in the gas contact metal part.

⚠️Warning: For correct usage, please make sure to read the ‘Instruction Manual’ carefully before use.

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