Nissan Tanaka
NISSAN TANAKA TORR-30 Pressure Regulator For Semiconductors
Manufacturer: Nissan Tanaka
Model: TORR-30
Low-pressure, standard model for the primary side low-pressure use: TORR-30
Features
- The TORR series is a pressure regulator that can be considered synonymous with “pressure regulators for semiconductor gases” thanks to its long track record and high reliability.
- Assembly is carried out in a clean room of class 1000, ensuring a cleanliness level of 0.3μm or better.
- We have integrated filters into the flow path of the primary chamber to reduce internal leaks.
- We conduct shipment inspections on all units, including helium leak testing.
- We can also produce electrolytic polishing specification products (surface roughness of the metal parts for gas connection: Ra0.25μm).
- The TORR-30 series is a standard model for low-pressure applications and can be widely used in facilities after decompression, such as valve boxes and indoor piping installation.
Basic Specifications
Use materials
Gas connection part
Main body: SUS316L
Diaphragm: SUS316L
Filter: SUS316L
Pressure Gauge: SUS316L (Screw-type connection)
Joint or fitting: SUS316L (Welded connection)
Other gas contact parts: SUS316L, SUS316, Fluororesin
Non-contact gas part
Cap: C3771
Pressure regulating handle: ABS plastic, C3604
Performance
Inlet side maximum working pressure: 5MPa
Outlet side maximum working pressure: 1.0MPa
Maximum flow rate: 300L/min(nor)(P1=10MPa, P2=0.6MPa, N₂ GAS)
Operating temperature: -5~40℃
Weight: 1.1kg
Built-in filter filtration degree: 20μm
Diameter of inlet and outlet ports: 1/4″
External leak amount: 1.3×10-9Pa・m3/sec below (Screw-type connection) & 1.3×10-10Pa・m3/sec below (Welded connection)
Flow Characteristics Diagram
Appearance
Description
Designated Attention
※1 If you select the 4-port specification, please select the symbol for the primary side pressure gauge from the following and replace the product name assembly with A0.
Primary side pressure gauge symbol | Maximum operating pressure |
---|---|
03:-0.1~0.3MPa(0.2MPa) | 30:-0.1~3.0MPa(2.0MPa) |
06:-0.1~0.6MPa(0.4MPa) | 50:0~5.0MPa(3MPa) |
10:-0.1~1.0MPa(0.6MPa) | A0:0~10MPa(5MPa) |
15:-0.1~1.5MPa(1.0MPa) |
※2 In the ‘SH’ series, which uses a Ni-Cr-Mo alloy of high corrosion-resistant alloy for the metal parts connected to the gas, it cannot be supported. The Ni-Cr-Mo alloy is equivalent to the ‘Hastelloy C-22’ of the American Haynes company.
※3 In the case without a secondary side pressure gauge, the symbols for each usage pressure are as follows:
Operating Pressure | Symbol |
---|---|
~0.2MPa | 03 |
~0.4MPa | 06 |
~0.6MPa | 10 |
~1.0MPa | 15 |
※4 You can only select fitting type S (Swagelok).
※5 Different symbols will apply for other shapes.
※6 Using italic fittings requires essentially a welded connection, whereas for other types of fittings, you will essentially have a threaded connection.
※7 You can select only fitting types S (Swagelok) and F (Finelok).
※8 Even when using “SH”, the gas contact metal part of the pressure gauge will be SUS316L. Please contact us if you desire a pressure gauge that uses Ni-Cr-Mo alloy in the gas contact metal part.
⚠️Warning: For correct usage, please make sure to read the ‘Instruction Manual’ carefully before use.
Kouei is Distributor/Agent of Nissan Tanaka
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