KOFLOC Corp.
KOFLOC 5100 Series High Grade Metal Seal Mass Flow Controller

Manufacturer: KOFLOC Corp.
Model: 5100 series
Flow Instruments
We provide various flow parts for measuring and controlling fluids, including mass flow controllers and meters, flow meters, flow control valves and pressure regulating valves.
Mass Flow Controllers/Meters

The mass flow controllers and meters, which measure the mass flow rate, are less influenced by the temperature and pressure as compared with mechanical flow meters and valves, and can electrically exchange information about the flow rate. They are used in a wide range of processes and equipment in the fields where high levels of accuracy, repeatability, responsiveness and cost effectiveness are required, such as semiconductors, optic fibers, various analyses, fuel cells, liquid crystal, organic electroluminescence, biotechnology, foods, environmental measurement, combustion gas control, plant facilities and examination equipment.
MODEL 5100 SERIES
■Applicable gas:N₂,Air,H₂,He,Ar,O₂,CO₂ etc.
■Range of maximum flow rate:(N₂)1SCCM~20SLM
■Accuracy:±1%F.S.
- Metal seals.
- Control of minute flows available from F.S.1SCCM by N₂ conversion.
- Reduced dead volume thanks to the diaphragm seat valve.
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