We provide various flow parts for measuring and controlling fluids, including mass flow controllers and meters, flow meters, flow control valves and pressure regulating valves.

Mass Flow Controllers/Meters

The mass flow controllers and meters, which measure the mass flow rate, are less influenced by the temperature and pressure as compared with mechanical flow meters and valves, and can electrically exchange information about the flow rate. They are used in a wide range of processes and equipment in the fields where high levels of accuracy, repeatability, responsiveness and cost effectiveness are required, such as semiconductors, optic fibers, various analyses, fuel cells, liquid crystal, organic electroluminescence, biotechnology, foods, environmental measurement, combustion gas control, plant facilities and examination equipment.

MODEL EX-201S SERIES

■Applicable gas：N2(Air,H2,He,Ar,O2,CO2,CH4/C.F. input)
■Full-scale flow rate：Gas　10/30/50/100/300/500SCCM 1/3/5/10SLM
■Accuracy：±1%S.P.(＞35%F.S.)　±0.1%F.S.(≦35%F.S.)

• Multi Gas Multi Range
• Compact design
• S.P. accuracy and 1sec response
• RS485 communication function
• Analog input / output selectable from 0 to 5VDC or 4 to 20mA
• Power supply selectable from ±15VDC or 24VDC
• CE