Japan, Nissan Tanaka, Optical Product
NISSAN TANAKA TPS Pressure Switch For Semiconductor Use
Manufacturer: Nissan Tanaka
Models: TPS (TPS-E1, TPS-E2, TPS-E3, TPS-E4, TPS-E5)
Suitable for pressure alarm of electronics material gas line. A variety models for high precision and portable light weight and from high pressure and low pressure.
Features
Material : SUS316L and SUS316
Leakage : Guaranteed He-leak less than 1.3×10－10Pa・m3/sec by welded connections
Small size and light weight
Setting pressure is changeable
Option : EP for materials in contact with media
Application
Suitable for pressure alarm and pressure control of electronics material gases or analysis gases required high purity, ultra clean and low leakage.
Cord color
| Cord color | Mode |
|---|---|
| Black | C (common terminal) |
| White | NO (normal open) |
| Red | NC (normal close) |
Specification
| Model | Setting pressure range | Using upper limit pressure (MPa) | Repeat accuracy MPa |
Working deviation MPa |
Other specification | ||||||||
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| Upper limit (MPa) | Lower limit (MPa) | ||||||||||||
| TPS-E1 | -0.076~ +0.034 |
-0.096~ +0.014 |
0.5 | ±0.006 | around 0.02 | 1) Current capacity : 5A－125VAC 2) Life time : 100,000 times 3) Connection : 1/4″ UJR Female, 1/4″ UJR Male or others 4) Surrounding temperature : －15～65℃(60％RH) 5) EP products (Option) 6) Cord length : About 300mm |
|||||||
| TPS-E2 | 0.04 ~ 0.25 |
0.02~0.23 | 2 | ±0.007 | around 0.02 | ||||||||
| TPS-E3 | 0.24 ~ 1.2 | 0.12~1.08 | 3 | ±0.036 | around 0.12 | ||||||||
| TPS-E4 | 0.8~4 | 0.4~3.6 | 5 | ±0.12 | around 0.4 | ||||||||
| TPS-E5 | 1~5 | 0.5~4.5 | 16.5 | ±0.15 | around 0.5 | ||||||||
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