Manufacturer: Nissan Tanaka
Model: S-TORR V 1300

High-pressure, standard model for the primary side high-pressure use

Features

• The S-TORR regulator is a high-purity gas pressure regulator developed based on the highly trusted TORR regulator used in semiconductor process gas lines.
• By eliminating screw structures in the gas contact section and standardizing electrolytic polishing, it achieves very high moisture replacement characteristics and particle reduction.
• The body and fittings are connected by welding, and the external seal of the diaphragm part uses a metal seal structure. It has high external sealability, allowing you to use it confidently even with high-purity gases.
• A filter is built into the flow path of the primary chamber to reduce internal leaks.
• Includes a helium leak test as part of the comprehensive shipment inspection.
• The STⅤ1300 series is a standard model for primary high-pressure applications and is widely used in primary pressure reduction facilities like cylinder cabinets.

Basic Specifications

Use materials
Gas connection part
Main body: SUS316L
Diaphragm: SUS316L
Filter: SUS316L
Pressure Gauge: SUS316L
Joint or fitting: SUS316L
Other gas contact parts: SUS316L, SUS316, Fluororesin
Non-contact gas part
Cap: C3604
Pressure regulating handle: ABS plastic, C3604

Performance
Inlet side maximum working pressure: 15MPa
Outlet side maximum working pressure: 1.0MPa
Maximum flow rate: 95L/min(nor)（P1=10MPa, P2=1.0MPa, N₂ GAS）
Operating temperature: -5～40℃
Weight: 0.9kg (2 ports), 1.3kg (4 ports)
Built-in filter filtration degree: 2μm
Surface roughness of connected gas metal parts: Ra0.25μm (optional： Ra0.1μm）
Diameter of inlet and outlet ports: 1/4″
External leak amount: 1.3×10^-11Pa・m3/sec below

Flow Characteristics Diagram

Appearance

Description

Designated Attention

※1 In the absence of a primary side pressure gauge, the symbol becomes B5.
※2 In the absence of a secondary side pressure gauge, the symbol for each operating pressure is as follows:

※3 In the case of 2 ports, please select ‘X’. ‘X’ refers to a product without a pressure gauge (port unprocessed). If only fittings are used without a pressure gauge, and the fitting is protected with a resin cap, the symbol is ‘F’, and if it is sealed with a metal plug, the symbol is ‘B’.
※4 Other types of joints will use different symbols.
※5 Other shapes will use different symbols.
※6 We have selected the optimal resin for the gas contact part (nozzle) for each type of gas used.
※7 This is an example of additional specifications. For other special measures such as specifying face-to-face dimensions, symbols or numbers will be used. Please contact us for more details.

⚠️Warning: For correct usage, please make sure to read the ‘Instruction Manual’ carefully before use.

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