Nissan Tanaka
NISSAN TANAKA S-TORR V 50 Pressure Regulator For Semiconductors
Manufacturer: Nissan Tanaka
Model: S-TORR V 50
Medium flow model for primary side low pressure: S-TORRⅤ50 / 50SH
Features
- The S-TORR regulator is a high-purity gas pressure regulator developed based on the highly trusted TORR regulator used in semiconductor process gas lines.
- By eliminating the threaded structure in the gas contact part and applying standard electropolishing, it achieves very high moisture displacement characteristics and particle reduction.
- The body and fittings are connected by welding, and a metal seal structure is adopted for the external seal of the diaphragm part. Due to its high external seal integrity, it can be used confidently even with gases of particularly high purity.
- A filter is built into the flow path of the primary chamber to reduce internal leaks.
- Includes a He leak test in all shipment inspections.
- The STⅤ50 series is a medium-flow model for primary low-pressure use, requiring more flow than the STⅤ30, and is widely used for low-pressure piping, outlet panels, and cylinder cabinets for liquefied gases.
- For corrosive gases, we offer the SH series, which uses a Ni-Cr-Mo alloy with high corrosion resistance for the main metal parts in contact with the gas.
Basic Specifications
Use materials
Gas connection part
Main body: SUS316L
Diaphragm: SUS316L / Ni-Cr-Mo alloy (STⅤ50SH)
Filter: SUS316L / Ni-Cr-Mo alloy (STⅤ50SH)
Pressure Gauge: SUS316L
Joint or fitting: SUS316L
Other gas contact parts: SUS316L, SUS316, Fluororesin/ Ni-Cr-Mo alloy, SUS316L, Fluororesin (STⅤ50SH)
Non-contact gas part
Cap: C3604
Pressure regulating handle: ABS plastic, C3604
Performance
Inlet side maximum working pressure: 1.5MPa
Outlet side maximum working pressure: 0.6MPa
Maximum flow rate: 420L/min(nor)(P1=0.7MPa, P2=0.6MPa, N₂ GAS)
Operating temperature: -5~40℃
Weight: 1.8kg (2 ports), 2.0kg (3 ports)
Built-in filter filtration degree: 10μm
Surface roughness of connected gas metal parts: Ra0.25μm (optional: Ra0.1μm)
Diameter of inlet and outlet ports: 3/8″
External leak amount: 1.3×10-11Pa・m3/sec below
Flow Characteristics Diagram
Appearance
Description
Designated Attention
※1 If you choose the 4-port specification, please select the symbol for the primary-side pressure gauge from the options below and replace it with the product name assembly “30X”
Primary Side Pressure Gauge Symbol (Maximum Operating Pressure) |
03G:-0.1~0.3MPa(0.2MPa) | 30G:-0.1~3.0MPa(1.5MPa) |
---|---|---|
06G:-0.1~0.6MPa(0.4MPa) | 30F: Instrumentation without a pressure gauge, with a port and a fitting cap (1.5MPa) | |
10G:-0.1~1.0MPa(0.6MPa) | 30B: Instrumentation without a pressure gauge, with a port and a fitting plug (1.5MPa) | |
15G:-0.1~1.5MPa(1.0MPa) |
※2 In the case of not having a secondary pressure gauge, the symbols for each operating
Operating Pressure | Symbol |
---|---|
~0.2MPa | 03 |
~0.4MPa | 06 |
~0.6MPa | 10 |
※3 In the case of 2 ports, please select “X.” “X” refers to a product without a pressure gauge (unprocessed port). If you have only fittings without a pressure gauge and want to protect the fitting with a resin cap, select “F.” If you want to secure it with a metal plug, select “B.”
※4 In the case of other types of joints, different symbols are used.
※5 In the case of other shapes, different symbols will be used.
※6 We have selected the optimal resin for each type of gas used in the gas connection part (nozzle).
※7 This is an example of additional specifications. In the case of specifying interfacial dimensions or other special requirements, different symbols or numbers will be used. Please inquire for more details.
⚠️Warning: For correct usage, please make sure to read the ‘Instruction Manual’ carefully before use.
Kouei is Distributor/Agent of Nissan Tanaka
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