NISSAN TANAKA TORR-2500 Series Pressure Regulator For Semiconductors

Manufacturer: Nissan Tanaka
Model: TORR-2500 Series

Features

The TORR series is a pressure regulator that has earned high reliability through its long history and can be considered the “icon” of pressure regulators for semiconductor gases.

Assembly is carried out in a cleanroom of class 1000 with a cleanliness level of 0.3μm or less.
A filter is built into the flow path of the primary chamber to reduce internal leaks.
All units undergo shipping inspections, including a helium leak test.
The TORR-2500 Series is used for gas supply equipment that requires higher flow rates than the TORR-2300 Series for primary high-pressure applications.
Please install a filter in the piping, as it does not have an integrated filter.

Specifications

Materials Used

Contact Gas Parts
Main Body : SUS316
Diaphragm: SUS316L
Pressure Gauge: SUS316L
Joint: SUS316
Other Contact Gas Parts: SUS316L, SUS316, Fluororesin

Non-Contact Gas Parts
Cap: C3604
Pressure Adjustment Handle: S45C

Performance

Maximum Inlet Pressure: 15MPa
Maximum Outlet Pressure: 1.0MPa
Maximum Flow Rate: 180m³/h (nor) (P1=8MPa, P2=1.0MPa, N2 GAS)
Operating Temperature:-5°C to 40°C
Weight:4.9kg
Internal Filter Filtration Level: The filter is not included; please install separately.
Inlet/Outlet Port Size: 3/8″
External Leak Rate: 1.3×10⁻⁶Pa·m³/sec or less

Flow Rate Characteristics Chart

Appearance

Description

TORR-2500

Selection Caution

※1 If there is no primary side pressure gauge, the symbol is B5.
※2 If there is no secondary side pressure gauge, the symbol is as follows for each operating pressure.

Working pressure	Symbol
~0.2MPa	3
~0.6MPa	10
~0.4MPa	6
～1.0MPa	15

※3 Other symbols are used for other shapes.
※4 When using diagonal joints, ② structure is basically a welded connection. In the case of other fittings, ② structure is basically a screw type connection.
※5 Only fitting types S (Swagelok) and F (Finelock) can be selected.