NISSAN TANAKA TORR-350 Pressure Regulator For Semiconductors

Manufacturer: Nissan Tanaka
Model: TORR-350

Low-pressure, high flow model for primary side low pressure: TORR-350

Features

  • The TORR series has earned high trust due to its long track record and is synonymous with “semiconductor gas pressure regulators.”
  • Technicians assemble every unit in a class 1000 clean room with a 0.3μm class rating.
  • Technicians perform helium leak tests and comprehensive inspections on all units before shipment.
  • We can produce specifications for electrolytic polishing as well (with connection gas metal surface roughness Ra0.25μm).
  • The TORR-350 series serves as a high-capacity model for primary low-pressure applications, suitable for large flow supplies of liquefied gas and for use in large-diameter piping.
  • Please install a filter in the piping as the unit does not incorporate one.

Basic Specifications

Use materials
Gas connection part
Main body: SUS316L
Diaphragm: Chloroprene rubber (Teflon cover on the gas contact surface)
Pressure Gauge: SUS316L
Joint or fitting: SUS316
Other gas contact parts: SUS316L, SUS316, Fluororesin
Non-contact gas part
Cap: C3604
Pressure regulating handle: C3604

Performance
Inlet side maximum working pressure: 1.5MPa
Outlet side maximum working pressure: 0.6MPa
Maximum flow rate: 230m3 /h(nor)(P1=1.5MPa, P2=0.6MPa, N₂ GAS)
Operating temperature: -5~40℃
Weight: 10kg
Diameter of inlet and outlet ports: 1/2″
External leak amount: 1.3×10-6Pa・m3/sec below (Threaded connection)/ 1.3×10-7Pa・m3/sec below (Welding connection)

Flow Characteristics Diagram

Appearance

Description

We will custom make the TORR-350 series according to your desired specifications. Please provide us with the details below.

Use Gas
Application
Inlet Pressure MPa
Inlet Pressure Gauge MPa
Outlet Pressure MPa
Outlet Pressure Gauge MPa
Flow Rate Used m3 /h(nor)(When Outlet Pressure is MPa)
Inlet Fitting
Outlet Fitting
Other Requests

Production Example

Product Name Primary Side Pressure Gauge Secondary Side Pressure Gauge Inlet Fitting Outlet Fitting
TORR-350HA None 1.0MPa Compound Gauge 20A Insert Sleeve
TORR-350HP None 0.6MPa Compound Gauge JIS10k25A Flange (RF)
TORR-350JH None 1.0MPa Compound Gauge JIS10k25A Flange (RF)

⚠️Warning: For correct usage, please make sure to read the ‘Instruction Manual’ carefully before use.


Kouei is Distributor/Agent of Nissan Tanaka
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