For Clean Room Use (ISO Standards Cleanliness Class 3)

With the low dust-generative roller structure and clean grease, the cleanliness class of ISO Standards Class 3^* (equivalent to FED Standard Class 1) has been achieved.

*About ISO Standards Class 3

[ISO Standards Class 3]

Uses Low Dust-Generative Clean Grease

Low dust-generative clean grease is used on the ball screw, guides, bearing etc.

Cleanliness class of Class 3 is Achieved With Minimum Suction

For example, EZSM3 can achieve the cleanliness class of ISO Standards Class 3, with a minimum internal suction volume of approximately 20 ℓ/min.

*For the correlation diagram of particle generation amount and suction volume for EZSM4 and EZSM6, refer to here