SHINKO SEIKI CO.
Shinko Seiki EXAM Plasma Etching Unit

Manufacturer: Shinko Seiki Co., Ltd.
Model: EXAM
Features
- Batch type plasma etching unit with 250 × 250 mm processing stage.
- This unit can etch quartz as well as silicone, oxide film, and nitride film.

Related Products
-

Shinko Seiki SGH Series Direct-Drive Oil Sealed Rotary Vacuum Pump
-

Shinko Seiki Vapor Deposition System For Lift-Off Process
-

Shinko Seiki AAMF Series Standard Vapor Deposition System
-

Shinko Seiki SRV Series Batch Type Sputtering System
-

Shinko Seiki Load-Lock Type Vapor Deposition System
-

Shinko Seiki SP Series Polarimeter (Strain Measuring Equipment)





