Shinko Seiki SWP Series High-Density Plasma Unit

Manufacturer: Shinko Seiki Co., Ltd.
Model: SWP Series

Features

  • The SWP series use surface wave plasma (SWP) to coat large areas in a uniform layer of high-density plasma. The unit has been adopted for ashing and CVD.
  • It enables damage-free ashing at high rate.

Specifications

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