Sinfonia SELOP Series Clean Transport Systems

Manufacturer: Sinfonia Technology co., LTD, Ltd.
Model: SELOP Series

Features

1. High-precision mapping
2. Particle free
3. SEMI standard conformity
4. Supports various substrate sizes
600×600mm
510×515mm
310×310mm
300×300mm
250×250mm

For more information, please contact our sales representative.

Specification

Model	SELOP20F12-SP	SELOP24F12-SP
Target work	515×510mm PANEL	600×600mm PANEL
Dimensions	W793×D739×H1433 (mm)	W793×D810×H1433 (mm)
Weight	140 kg	150 kg
Application	6/12 PANELS FOUP (Compliant with SEMI E-181 standard)
Cycle time	20sec.at FOUP opening (incl. mapping process) 15sec.at FOUP closing (excl. mapping process)
Door holding method	Vacuum absorption method
Positioning accuracy	±0.1mm on FOUP front / rear axis、±0.1mm on FOUP up / down axis
Detecting function	①FOUP presence ②FOUP placement ③FOUP door presence ④Wafer mapping ⑤Wafer protrusion ⑥Hand safety
Moving mechanism	①Door (Up/Down・Open/Close・Wafer mapping) : Stepping motor・Timing belt ②Clamp・Dock・Latch key: Air cylinder
Standard function	①Wafer mapping ②Controller ③Undock position adjustment function (for adjustment with OHT line) ④BOLTS surface position adjustment mechanism ⑤Self-standing caster ⑥Ethernet※ communication specification
Utility	①Electricity： DC24V 5A ②Air : 0.45 ‒ 0.6MPa 10L/min ③Vacuum air :－60Kpa 5L/min
Communication interface	RS232C, Ethernet※ TCP/IP
Option	①Customizable indicator panel ②Customizable switch panel ③Carrier ID reader ④Infopad (A,B,C,D,E,F)） (hard pin and sensor) ⑤PIO ⑥Excluding mapping function ⑦Applicable to AC200V ⑧E84 ⑨E84,CID communication ⑩Sealing to BOLTS surface ⑪N₂ purge

*1. For more information, please contact our sales representative.
*2. Ethernet is either a registered trademark or a trademark of Xerox Corporation in the United States and/or other countries.