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YASKAWA MECHATREC SUEMATSU KYUKI CORP.
YASKAWA SEMISTAR-GEKKOMD124D Clean Robot For Handling Semiconductor Wafers And Glass Substrates
Manufacturer: YASKAWA MECHATREC SUEMATSU KYUKI CORP.
Model: SEMISTAR-GEKKOMD124D
Wafer handling robot that fits the future of semiconductors:
Winner of the 63rd (2020) Nikkan Kogyo Shimbun Top Ten New Products Award.
Purpose of use: Transport
Product Description
A direct-drive motor minimizes stress on the wafer, enabling high-speed and high-precision transport. In addition, the system operates without a battery.
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