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YASKAWA MECHATREC SUEMATSU KYUKI CORP.
YASKAWA SEMISTAR-VD20S Clean Robot For Handling Semiconductor Wafers And Glass Substrates
Manufacturer: YASKAWA MECHATREC SUEMATSU KYUKI CORP.
Model: SEMISTAR-VD20S
A clean robot for wafer handling that embodies the ideal of being fast and damage-free.
Purpose of use: Transport
Product Description
The robot supports glass substrates up to the fourth-generation half-size class of 460 × 730 mm. Moreover, its high-rigidity design and advanced control system reduce vibration and ensure high-precision positioning. In addition, eliminating the vacuum belt drive significantly reduces gas emissions. Furthermore, designers can integrate the substrate presence/absence sensor wiring directly into the arm.











