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YASKAWA MECHATREC SUEMATSU KYUKI CORP.
YASKAWA SEMISTAR-VD35S-G4A Clean Robot For Handling Semiconductor Wafers And Glass Substrates
Manufacturer: YASKAWA MECHATREC SUEMATSU KYUKI CORP.
Model: SEMISTAR-VD35S-G4A
A clean robot for wafer handling that embodies the ideal of being fast and damage-free.
Purpose of use: Transport
Product Description
The robot supports glass substrates up to the fourth-generation class of 730 × 920 mm. Moreover, a link mechanism in the arm increases rigidity. In addition, eliminating the vacuum belt drive reduces gas emissions. Furthermore, engineers can integrate the substrate presence sensor wiring directly into the arm.
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