- Home
- Products
- YASKAWA SEMISTAR-VD95D Clean Robot For Handling Semiconductor Wafers And Glass Substrates
YASKAWA MECHATREC SUEMATSU KYUKI CORP.
YASKAWA SEMISTAR-VD95D Clean Robot For Handling Semiconductor Wafers And Glass Substrates
Manufacturer: YASKAWA MECHATREC SUEMATSU KYUKI CORP.
Model: SEMISTAR-VD95D
A clean robot for wafer handling that embodies the ideal of being fast and damage-free.
Purpose of use: Transport
Product Description
The robot supports glass substrates up to the fourth-generation class of 730 × 920 mm. Moreover, the arm’s link mechanism increases rigidity. In addition, the design eliminates the vacuum belt drive and reduces gas emissions. Furthermore, the arm accommodates the wiring for the substrate presence sensor.
Related Products
-

YASKAWA MOTOMAN-MPP3H Picking And Packing Robots
-

YASKAWA MOTOMAN-MHJ Handling Robot
-

YASKAWA SEMISTAR-GEKKOMD124D Clean Robot For Handling Semiconductor Wafers And Glass Substrates
-

YASKAWA MOTOMAN-215L Handling Robot
-

YASKAWA MOTOMAN-PL500 Palletizing Robot
-

YASKAWA MOTOMAN-SP180H-110 Spot Welding Robot





