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YASKAWA MECHATREC SUEMATSU KYUKI CORP.
YASKAWA SEMISTAR-VS22LDS Clean Robot For Handling Semiconductor Wafers And Glass Substrates
Manufacturer: YASKAWA MECHATREC SUEMATSU KYUKI CORP.
Model: SEMISTAR-VS22LDS
A clean robot for wafer handling that embodies the ideal of being fast and damage-free.
Purpose of use: Transport
Product Description
A compact and lightweight model for low vacuum applications, equipped with a battery-less absolute encoder.
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