Osaka Vacuum
Osaka Energy Efficient Heated Type TG-MI Series Turbo Molecular Pumps
Manufacturer: Osaka Vacuum, Ltd.
Model: TG-MI Series
Specifications
| TG390MI | TG420MI | TG900MI | TG1300MI | TG2400MI | |
| Flange | |||||
| Inlet | VG100 ISO-80 | VG150 ISO-100 | VG150 ISO-160 | VG200 ISO-200 | VG250 ISO-250 |
| Outlet | KF25 | KF25 | KF40 | KF40 | |
| Volume flow rate | |||||
| N₂ (L/s) | 340 | 400 | 900 | 1300 | 2400 |
| N₂ (with protective screen) | 320 | 370 | 860 | 1230 | 2300 |
| H₂ (L/s) | 290 | 300 | 1050 | 1200 | 1100 |
| Max. compression ratio | |||||
| N₂ | 1×106 | ||||
| H₂ | 4.5×103 | 1.5×104 | 8.3×102 | ||
| Base pressure (Pa/Torr) | < 1×10-6 (< 7.5×10-9) | ||||
| Max. throughput *1 (N₂, sccm) | 2000 | 3000 | |||
| Startup time (min) | 2–3 | 2–3 | 4–5 | 4–5 | 4–5 |
| Shutdown time (min) | 4–5 | 4–5 | |||
| Max. backing pressure (Pa/Torr) | 350 (2.6) | 500 (3.8) | 150 (1.1) | ||
| Recommended backing vacuum pump (L/min) | ≥160 | ≥160 | ≥250 | ≥250 | ≥500 |
| Weight (kg) | 18 | 42 | 56 | ||
| Turbo Controller | TC010MAT | ||||
*1 In case of the backing pump of 320 L/min (TG390/420MI), 1000 L/min (TG900/1300/2400MI).
*2 The dimension is same as a standard specification.
