Sakaguchi ExLASER

Manufacturer: Sakaguchi Electric Heaters CO., LTD.

Features

  • Ultra-fast heating and cooling is possible
  • Uniform heating of 2-inch substrates in one shot
  • Direct heating is possible only to the object to be heated
  • Temperature control is possible to match the process
  • Energy saving without heating the atmosphere

Specifications

Model Number: EXL-CT-010-DS55
Laser irradiation methodDirect typeBody sizeH 625mm ×W 700mm ×D 320mm
Laser powerUp to 1kWAccessoriesDedicated Chiller
Laser wavelength808nmFreeze frameBody: 1P200V20A
Chiller: 1P200V15A
Laser ShapeSquare
Optics (uniformity)Homogenizers (±5%)RemarksJST original modeling
development product (FY17)
Heating area□ 55mm
Work distance400mm~

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