Daido Special Filter DFZC

Manufacturer: DAIDO MACHINES CO., LTD
Model: DFZC

Feature

  • All Teflon Membrane Filter
  • DFZC is capsule type filter made from Teflon.
  • It is suitable for semiconductor process lines.

Specifications

Materials of CompositionHardware / PFA Media / PTFE
Support / PTFE Center Core / PFA
Filtration Precision
(Absolute microns)
0.03, 0.05, 0.1, 0.2, 0.45, 1
Connection and DimensionsPillar fitting: Super type, 300 series, Flaretech, Buttweld
Length: 4, 10, 20, 30 (inch)
Maximum Differential Pressure
& Operating Temperature
0.55MPa / 24°C
0.1MPa / 180°C
Applicable FluidsHigh temperature semiconducting chemicals, Chemicals, Photoresist, Concentrated acid, Ozone water, etc
Model Code

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