Manufacturer: Sinfonia Technology co., LTD, Ltd.
Model: 300mm EFEM Clean 

Features

1. Vacuum and Vacuum-Less Wafer Handling (Clean Class 1)
The system supports both vacuum and vacuum-less wafer handling, reducing particle adhesion to the wafer’s backside.
2. Compatibility with 200 mm and Quartz Wafers
The system supports 200 mm wafers and quartz wafers. Additionally, it offers optional compatibility with 300 mm wafers.
3. High-Speed and High-Precision Wafer Handling
The system delivers fast and accurate wafer handling with a positioning accuracy of ±0.05 mm.
4. Optional N2 Purge Load Ports
The system supports optional N2 purge load ports for additional wafer handling requirements.
5. Standard Three-Load-Port Configuration with Expandable Modules
The standard configuration includes three load ports. Additionally, optional expansion modules provide greater flexibility.
6. Corrosion Resistance
The system offers optional corrosion-resistant features to meet specific operating requirements