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Chiyoda Seiki EX-100-TD Excellent For Corrosive Gas, Inner Surface Special Coating (Primary pressure: 20.0 MPa or less/adjustment pressure 0.1 to 1.0 MPa, maximum flow rate: 50 ℓ, 150 ℓ/min・Air)

Made in Japan
Manufacturer: Chiyoda Seiki
Model: EX-100-TD

Features

The design adopts an integrated valve and diaphragm type (tie diaphragm).
The parts of the gas contacting are made from SUS316 and undergo special corrosion-resistant surface treatment.
Super-secret structure with He leakage (external leakage) of 1×10-9Pa-m3/sec or less.
Prevents gas leakage from external blowout in the event of diaphragm breakage.

EX-100-TD

Specifications

ModelEX-20-TDEX-100-TD
Certified ProductMR-EX-20-TDMR-EX-100-TD
SpecificationG1G1
Suitable Use GasUltra-pure Toxic/corrosiveUltra-pure, toxic, corrosive
BodySUS316SUS316
Material DiaphragmSUS316SUS316
Second-rate Pressure ForBelow 20.0MPa
Adjustment Pressure0.1~1.0MPa
Standard Flow0~202/min (standard state)0-100g/min (standard state)
Maximum Flow502/min (standard state)150g/min (standard state)
Maximum CV Value0.05
Operating Temperature-10~+60°C
Dew Point TemperatureBelow -70°C
He External ValueBelow 1X10Pa•m/sec
Dary Pressure Gauge ConG1/4G1/4
Entrance PureVCR 1/4 welded structure also strong, mouth 1/4 welded structure
Export MirrorVCR 1/4 welded structure, Tianmen mouth 1/4 welded structure
Mouthnone
Deathnone
Quality1,2 kg1,3 kg

 

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