Nissan Tanaka
NISSAN TANAKA TORR-3300 Series Pressure Regulator For Semiconductors
Manufacturer: Nissan Tanaka
Model: TORR-3300 Series
Features
The TORR series is a pressure regulator that has earned high reliability through its long history and can be considered the ‘icon’ of pressure regulators for semiconductor gases.
All units undergo shipping inspections, including a helium leak test.
The TORR-3300 Series is a high-flow model for primary high-pressure applications. It can supply a maximum of 220m³/h (nor).
The device does not include an integrated filter; please install a filter in the piping.
Specifications
Materials Used:
Contact Gas Parts
Main Body: SUS316
Diaphragm: Chloroprene Rubber (Teflon Cover on the Contact Gas Side)
Pressure Gauge: SUS316L
Joint: SUS316
Other Contact Gas Parts: SUS316L, SUS316, Fluororesin
Non-Contact Gas Parts:
Cap: C3604
Pressure Adjustment Handle: C3604
Performance
Maximum Inlet Pressure: 20MPa
Maximum Outlet Pressure: 1.0MPa
Maximum Flow Rate: 220m³/h (nor) (P1=8MPa, P2=0.6MPa, N2 GAS)
Operating Temperature:-5°C to 40°C
Weight: 14 kg
Internal Filter Filtration Level: The filter is not included; please install separately.
External Leak Rate: 1.3×10⁻⁶Pa·m³/sec or less
Flow Rate Characteristics Chart
Appearance
Product name structure
The TORR-3300 Series will be custom-made to your specifications. Please contact us regarding the following details.
Gas used | |
Purpose | |
Inlet pressure gauge | MPa |
Inlet pressure gauge | MPa |
Outlet pressure | MPa |
Outlet pressure gauge | MPa |
Usage flow rate | m3 /h(nor) (at outlet pressure MPa) |
Inlet fitting | |
Outlet fitting | |
Other requests |
Production example
Product name | Primary side pressure gauge | Secondary pressure gauge | Inlet joint Outlet joint |
TORR-3300BJ | 35MPa Gauge | 1.5MPa Coupled Gauge | 15A Insert Sleeve |
TORR-3300AT | 35MPa Gauge | 1.5MPa Coupled Gauge | 20A Insert Sleeve |
⚠️Warning: In order to use the product correctly, please be sure to read the “Instruction Manual” carefully before use.
Kouei is Distributor/Agent of Nissan Tanaka
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