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- Chiyoda Seiki EX-M-20 Excellent Mega (Primary pressure: 20.0 MPa or less/adjustment pressure 0.1 to 1.0 MPa, maximum flow rate: 50 ℓ, 150 ℓ/min・Air)
Chiyoda Seiki, Japan
Chiyoda Seiki EX-M-20 Excellent Mega (Primary pressure: 20.0 MPa or less/adjustment pressure 0.1 to 1.0 MPa, maximum flow rate: 50 ℓ, 150 ℓ/min・Air)
Made in Japan
Manufacturer: Chiyoda Seiki
Model: EX-M-20
Feature
Super airtight structure with external leakage of 5×10-11 Pa-m3/sec. or less.
Ultra-clean finish to minimize particles.
The pressure gauge (Clean M) is used, which has undergone an ultra-clean process. （All gas contacting parts are EP (electropolished and VCR joints included) treated.)
Specifications
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