Made in Japan
Manufacturer: Chiyoda Seiki
Model: EX-M-500

Feature

Super-sealed structure with external leakage of 5×10-11Pa-m3/sec. or less.
Ultra-clean finish to minimize particles.
Ultra-clean pressure gauges (Clean M) are used. （All gas contacting parts are treated with EP (including electrolytic polishing and VCR joints).

Applications

High-purity gas supply system for ultra LSI manufacturing.
Supply systems for ultra-pure gases and mixed gases.
Various gas systems requiring ultra-cleanliness and ultra-high purity.

Panel Mounting
Panel hole: Φ36.5mm
Panel thickness: 4.5 mm or less
Mounting nut side to side: 41mm

Specifications