NISSAN TANAKA TORR-50 Pressure Regulator For Semiconductors

Manufacturer: Nissan Tanaka
Model: TORR-50

Low-pressure, standard model for the primary side low-pressure use: TORR-50

Features

The TORR series is a pressure regulator that can be said to be a synonym for “semiconductor gas pressure regulators” due to its long track record and high reliability.
Assembly is carried out in class 1000 clean rooms with 0.3μm filtration.
A filter is built into the flow path of the primary chamber, reducing internal leak occurrence.
Includes helium leak testing as part of the comprehensive inspection carried out on all items before shipment.
Production of electropolished models is possible (surface roughness of gas-contacting metal parts Ra0.25μm).
The TORR-50 series is a medium-flow model for primary low-pressure applications and can be used for the primary pressure reduction of liquefied gases or in piping that requires flow rate control, among other uses.

Basic Specifications

Use materials
Gas connection part
Main body: SUS316L
Diaphragm: SUS316L
Filter: SUS316L
Pressure Gauge: SUS316L (Screw-type connection)
Joint or fitting: SUS316L (Welded connection)
Other gas contact parts: SUS316L, SUS316, Fluororesin
Non-contact gas part
Cap: C3604
Pressure regulating handle: ABS plastic, C3604

Performance
Inlet side maximum working pressure: 3.5MPa
Outlet side maximum working pressure: 1.0MPa
Maximum flow rate: 740L/min(nor)（P1=1.5MPa, P2=0.6MPa, N₂ GAS）
Operating temperature: -5～40℃
Weight: 1.6kg
Built-in filter filtration degree: 20μm
Diameter of inlet and outlet ports: 3/8″
External leak amount: 1.3×10^-8Pa・m3/sec below (Screw-type connection) & 1.3×10^-9Pa・m3/sec below (Welded connection)

Flow Characteristics Diagram

Appearance

Description

Designated Attention

※1 If you select the 4-port specification, please select the symbol for the primary side pressure gauge from the following and replace the product name assembly with A0.

Primary side pressure gauge symbol	Maximum operating pressure
03：-0.1～0.3MPa（0.2MPa)	15：-0.1～1.5MPa（1.0MPa)
06：-0.1～0.6MPa（0.4MPa)	30：-0.1～3.0MPa（2.0MPa)
10：-0.1～1.0MPa（0.6MPa)	50：0～5.0MPa（3MPa)

※2 In the ‘SH’ series, which uses a Ni-Cr-Mo alloy of high corrosion-resistant alloy for the metal parts connected to the gas, it cannot be supported. The Ni-Cr-Mo alloy is equivalent to the ‘Hastelloy C-22’ of the American Haynes company.
※3 In the case without a secondary side pressure gauge, the symbols for each usage pressure are as follows:

Operating Pressure	Symbol
～0.2MPa	03
～0.4MPa	06
～0.6MPa	10
～1.0MPa	15

※4 You can only select fitting type S (Swagelok).
※5 Different symbols will apply for other shapes.
※6 Using italic fittings requires essentially a welded connection, whereas for other types of fittings, you will essentially have a threaded connection.
※7 You can select only fitting types S (Swagelok) and F (Finelok).
※8 Even when using “SH”, the gas contact metal part of the pressure gauge will be SUS316L. Please contact us if you desire a pressure gauge that uses Ni-Cr-Mo alloy in the gas contact metal part.