Japan, Nissan Tanaka, Optical Product
NISSAN TANAKA TLF, SHF Filter For Semiconductor Use
Manufacturer: Nissan Tanaka
Model: TLF, SHF (TLF-S4, TLF-V4, SHF-S4, SHF-V4)
Suitable for electronics material gases. A variety of models for high precision and light weight and from high pressure to low pressure.
Features
Hi-Precision
Material : SUS316L for TLF Series, SUS316 for SHF series
TLF series uses Teflon PTFE Membrane for element and catch smaller particle by proportion of hole diameter.
Leakage
Guaranteed He-leak less than 1.3×10－10Pa・m3/sec by welded connections.
Surface Finish
Internal surface polishing is standard for TLF series.
Small size and light weight
Saving the piping space.
Application
Suitable for electronics material gases and analysis gases required high purity and ultra clean gas line.
Specification
Low pressure line filter
| Model | Connection | Material | particle size (μm) | Flowrates | Maximum using Pressure (MPa) | |||||||
|---|---|---|---|---|---|---|---|---|---|---|---|---|
| Body | Element | Inlet pressure 0.1MPa | Inlet pressure 0.3MPa | |||||||||
| TLF-S4 | 1/4”SL | SUS316L | Teflon Membrane | 0.01 | 10L/min(nor) | 25L/min(nor) | 0.97 | |||||
| TLF-V4 | 1/4”VCR | |||||||||||
High pressure line filter
| Model | Connection | Material | Particle size μm | Flowrates | Maximum using Pressure (MPa) | |||||||
|---|---|---|---|---|---|---|---|---|---|---|---|---|
| Body | Element | Inlet pressure 0.1MPa | Inlet pressure 0.3MPa | |||||||||
| SHF-S4 | 1/4”SL | SUS316 | SUS316 | 2 | 20m³/h(nor) | 40m³/h(nor) | 15 | |||||
| SHF-V4 | 1/4”VCR | |||||||||||
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