Manufacturer: Sinfonia Technology co., LTD, Ltd.
Model: SELOP-08 Series

Features

1. OHT Transfer Compatibility
The system supports OHT transfer while maintaining the required SEMI E15 C2 clearance.
2. E63 BOLTS-M Installation
The simple mounting design ensures easy installation and supports the E63 BOLTS-M interface.
3. RS-232C/Ethernet Compatibility
The high-performance, reliable control system supports RS-232C and Ethernet communication. Additionally, it offers optional PIO compatibility.
4. 8-Cell Indicator

The system utilizes the same 8-cell indicator as the 300 mm Load Port.
5. Mapping Functionality
The mapping system detects single, double, and cross-positioned wafers
Ethernet is a registered trademark of Fuji Xerox Co., Ltd.

Operation Flow