Sinfonia SELOP-08C12F-S81 Series Clean Transport Systems

SINFONIA TECHNOLOGY CO., LTD.

Manufacturer: Sinfonia Technology co., LTD, Ltd.
Model: SELOP-08C12F-S81 Series

Features

1. Automatic carrier identification function
2. Mapping function
3. Wafer-out detection

Two Types of Open Cassette Adapter

Many experiences
Tilt type
Low cost model
Horizontal type

Operation Flow

Specification

LOAD PORT	SELOP08C12F-S81 Series
Dimensions	W474mm x D547mm x H1381mm (Load Port)
	W455mm x D300mm x H432mm (Tilt-type 200mmOCA)
	W430mm x D315mm x H373mm (Horizontal-type 200mmOCA)
Weight	65kg (LP)
	13.2kg (Tilt-type 200mmOCA)
	8.5kg (Horizontal-type 200mmOCA)

	200mm wafer operation	300mm wafer operation
Application	200mm 25 slot cassette (SEMI-Standard)	300mm 25 slot FOUP (SEMI-Standard)
Cycle time	Open: 11sec. (including mapping), Close: 7sec. (excluding mapping)	Open: 12sec. (including mapping), Close: 9sec. (excluding mapping)
Door holding method	N/A	Vacuum absorption method
Detecting function	①Open cassette normal placement ②Stage normal placement ③Wafer mapping ④Wafer protrusion ⑤Hand safety	①FOUP normal placement ②Foup door checking ③Wafer mapping ④Wafer protrusion ⑤Hand safety
Standard feature	①Wafer mapping ②Controller ③Carrier base placement adjustment mechanism ④Bolts surface position adjustment mechanism
Standard feature	⑤Cassette side-slip prevention ⑥300mm FOUP Infopad pin holder ⑦Stage fixation at wafer horizontal position ⑧Minimizing vibration in rotating and power
Utility	①Power: DC24V 5A ②CDA: 0.45~0.6 MPa 20 L/min ③Vacuum: -40kPa 5L/min
Communication interface	RS232C or Ethernet*2
Options	①Customizable indicator panel ②Customizable switch panel ③Applicable to AC200V ④Applicable to FOSB*1 ⑤E84 ⑥E84,CID communication (300mm FOUP only)

*1. Depending on FOSB type, performance may vary. please contact us for details.
*2. Ethernet is either a registered trademark or a trademark of Xerox Corporation in the United States and/or other countries.