Manufacturer: Sinfonia Technology co., LTD, Ltd.
Model: Smart SELOP-8 Series

Features

Our hybrid pneumatic and electric drive mechanism significantly reduces vibration during door opening and closing, improving particle control performance. Additionally, the system supports highly sealed FOUPs.
1. N2 Purging on Carrier Base
The system supports ENTEGRIS A-300 and Spectra FOUPs with four purge ports

2. Clean N2 Gas Purging
Filters positioned directly in front of the nozzles prevent particles from entering the FOUP.
Additionally, the nozzles ensure secure contact with the FOUP grommets.
3. N2 Gas Flow Monitoring
A flow meter continuously monitors the N2 gas flow rate

4. N2 Gas Flow Control
A mass flow controller (MFC) precisely regulates the N2 gas flow rate.

5.Easy Field Upgrade
Operators can upgrade the standard SELOP8 to an N2 purge load port directly in the field.

Stable N2 Purging with Our Patented Movable Nozzle

Control nozzle up/down timing
Avoid interference to Kinematic Pin during FOUP placement Interoperatability of non-N₂ purge FOUP
Adjustment function of nozzle pressure
Exchangeable nozzle heads for Suitable attach to ports
Nozzle up/down position detect function (Sensor)