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YASKAWA MECHATREC SUEMATSU KYUKI CORP.
YASKAWA SEMISTAR-VD10S Clean Robot For Handling Semiconductor Wafers And Glass Substrates
Manufacturer: YASKAWA MECHATREC SUEMATSU KYUKI CORP.
Model: SEMISTAR-VD10S
A clean robot for wafer handling that embodies the ideal of being fast and damage-free.
Purpose of use: Transport
Product Description
Supports glass substrates up to the second generation (400 x 500 mm class).
High-rigidity design and high-performance control enable low-vibration, high-precision positioning.
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