NISSAN TANAKA TORR-H Series Pressure Regulator For Semiconductors

Manufacturer: Nissan Tanaka
Model: TORR-H Series

Features

The TORR series has earned high trust through a long track record and is synonymous with “semiconductor gas pressure regulators.”
Assembly is carried out in a class 1000 cleanroom with 0.3μm filtration.
A filter is built into the flow path of the primary chamber to reduce internal leaks.
All units are subjected to a helium leak test and shipment inspection.
It is possible to produce electrolytically polished models (Surface roughness of the gas contact metal part is Ra0.25μm).
The TORR-H series is capable of high-pressure control on the secondary side (up to 15MPa).

Specifications

Materials Used (TORR-H)

Gas Contact Parts:
Main body: SUS316L
Piston: SUS316
Filter: SUS316
Pressure gauge: SUS316L
Fittings: SUS316
Other gas contact parts: SUS316, fluororesin, fluororubber

Non-Gas Contact Parts:
Cap: C3604
Pressure adjustment handle: S45C

Performance

Maximum inlet pressure: 20MPa
Maximum outlet pressure: 15MPa
Maximum flow rate: 800L/min (normal conditions; when P1=13MPa, P2=12MPa, N2 GAS)
Operating temperature range: -5 to 40℃
Weight: 2.0kg
Built-in filter filtration level: 2μm
|Inlet/outlet port diameter: 1/4″
External leak rate: 1.3×10^-7 Pa·m³/sec or less

Flow Rate Characteristics Chart

Appearance

TORR-H Series

Description

Selection Caution

※1: Electrolytic polishing models cannot be chosen.
※ 2: If there is no primary side pressure gauge, the symbol for each use pressure is as follows.

Working pressure	Symbol
～15MPa	B5
～20MPa	C5

※ 3: If there is no secondary side pressure gauge, the symbol for each use pressure is as follows.

Working pressure	Symbol	Working pressure	Symbol
～3.0MPa	50	～12MPa	B0
～6.0MPa	A0	～15MPa	B5

※4: Only fitting type S (Swagelok) can be selected.
※5: Other shapes will use different symbols.
※ 6: If using italicized fittings, the structure will basically be welded connections. For other types of fittings, the structure will basically be threaded connections.
※7: Only fitting types S (Swagelok) and F (Fine Lock) can be selected.
※8: If the W (welded connection) is chosen for the ② structure, W2R, W2L, and BHE cannot be chosen.