Kuwana Metals
Kuwana Metals Aera Transformer Digital Mass Flow Products
Manufacturer: Kuwana Metals, Ltd.
Model : Aera Transformer
Features
- Multi-gas, multi-range selection
- Fast response
- All-metal seals
- Field programmable*
- Device Net^TM, RS-485, or analog control
- Multiple alarm and diagnostic capabilities
- RoHS compliant
Benefits
- Outstanding accuracy, repeatability, and stability
- Superior reliability
- Comprehensive communication and control
- Easy integration
- Substantial cost savings
- World-class service and support
Specifications
| Operational | 780X/785X Series | 781X/786X Series | 782X Series |
|---|---|---|---|
| Full-Scale Range (N2 Equivalent) | Single-gas models—10 sccm to 5 slm | Single-gas models—5 to 50 slm | Single-gas models—5 to 50 slm |
| Multi-gas model (1)—10 to 30 sccm | Multi-gas model (7)—5001 to 10, 000 sccm | ─ | |
| Multi-gas model (2)—31 to 100 sccm | Multi-gas model (8)—10,001 to 30,000 sccm | ─ | |
| Multi-gas model (3)—101 to 300 sccm | ─ | ─ | |
| Multi-gas model (4)—301 to 1000 sccm | ─ | ─ | |
| Multi-gas model (5)—1001 to 3000 sccm | ─ | ─ | |
| Multi-gas model (6)—3001 to 5000 sccm | ─ | ─ | |
| Accuracy | ≤ ±1% of set point (25 to 100% of full scale) ≤ ±0.25% of full scale (2 to 25% of full scale) | ≤ ±2.0% of full scale | |
| Settling Time | ≤ 1.0 s typical per SEMI E17-91 (above 10% of full scale) | ≤ 4.0 s | |
| Linearity | ≤ ±0.5% of full scale | ≤ ±1.0% of full scale | |
| Repeatability | ≤ ±0.2% of full scale | ||
| Leak Integrity | 1×10^-11 Pam3/s (He) max | ||
| Control Range | 2 to 100% of full scale | ||
| Differential Pressure | 7 to 40 psiD (49 to 275 kPaD) | 21 to 40 psiD (147 to 275 kPaD) | |
| Max Operating Pressure | 70 psiG (490 kPaG) | ||
| Proof Pressure | 140 psiG (981 kPaG) | ||
| Temperature | 15 to 50°C | ||
| Alarm/Diagnostics | Flow, valve voltage, auto-zero adjustment, communications, and microprocessor errors | ||
| Physical | 780X/785X Series | 781X/786X Series | 782X Series |
|---|---|---|---|
| Control Valve Type | Normally-closed or normally-open solenoid | ||
| Seals | Metal | ||
| Materials | 316LSS, 316SS, PTFE, KM45 | ||
| Standard Fittings | 1/4″ VCR^TM compatible; 1.5”/1.125” IGS bottom/surface mount (c-seal or Wseal^TM) | 3/8” VCR^TM compatible; IGS bottom/ surface mount (c-seal or Wseal^TM) | |
| Surface Finish | Electropolished and ultra-cleaned to ≤ 5 Ra | ||
| Attitude Sensitivity | May be mounted in any position | ||
| Weight | 1.0 kg (1/4” VCR^TM compatible) | 2.8 kg (3/8” VCR^TM compatible) | |
| Electrical | 780X/785X Series | 781X/786X Series | 782X Series |
|---|---|---|---|
| Connection Type | 9-pin D or DeviceNet^TM | ||
| Input Power | +15 VDC ±2% at ≤ 140 mA, -15 VDC ±2% at ≤ 240 mA | ||
| DeviceNet^TM: +11 VDC at 550 mA, +24 VDC at 225 mA | |||
| Power Consumption | 4.5 W max | 4.8 W max | |
| Input Signal | Analog mode: 0 to 5 VDC (input impedance > 1 MΩ) | ||
| Digital mode: 0 to 100% | |||
| DeviceNet^TM: ODVA (125 K, 250 K, 500 Kbps) | |||
| Output Indication | Analog mode: 0 to 5 VDC (input impedance > 2 kΩ) | ||
| Digital mode: 0 to 100% | |||
| DeviceNet^TM: ODVA (125 K, 250 K, 500 Kbps) | |||
| Digital/Service Communications | EIA standard, RS-485, two-wire, half-duplex, multi-drop with one RJ-11 connector (DeviceNet® models) or two RJ-11 connectors (9-pin D models) | ||
- Note: For full model and suffix code information, see Model and Suffix Codes on next page. Specifications are subject to change without notice.
Model and Suffix Codes
■ Mass Flow Controllers
| Category | Description | Suffix Codes | ||||||||
|---|---|---|---|---|---|---|---|---|---|---|
| Product Type | Mass flow controller | FC- | … | … | … | … | … | … | … | … |
| Connector Type | DeviceNet™ | … | DN | … | … | … | … | … | … | … |
| 9-pin D | … | PA | … | … | … | … | … | … | … | |
| RoHS Compliance | Compliant with RoHS directives | … | … | R | … | … | … | … | … | … |
| Full-Scale Flow Range※1 | 10 sccm to 5 slm | … | … | … | 780 | … | … | … | … | … |
| … | … | … | 7800 | … | … | … | … | … | ||
| … | … | … | 785 | … | … | … | … | … | ||
| … | … | … | 7850 | … | … | … | … | … | ||
| 5 to 50 slm | … | … | … | 781 | … | … | … | … | … | |
| … | … | … | 7810 | … | … | … | … | … | ||
| … | … | … | 786 | … | … | … | … | … | ||
| … | … | … | 7860 | … | … | … | … | … | ||
| 50 to 200 slm | … | … | … | 782 | … | … | … | … | … | |
| … | … | … | 7820 | … | … | … | … | … | ||
| Control Valve | Normally-closed | … | … | … | … | C | … | … | … | … |
| Normally-open | … | … | … | … | … | … | … | … | … | |
| Connector※2 | Top mounted connector | … | … | … | … | … | T | … | … | … |
| Side mounted pigtail connector | … | … | … | … | … | Y | … | … | … | |
| Fittings | 1/4” VCR™ compatible | … | … | … | … | … | … | 4V | … | … |
| 3/8″ VCR™ compatible (782x Series only) | … | … | … | … | … | … | 6V | … | … | |
| 1.125” c-seal | … | … | … | … | … | … | BA | … | … | |
| 1.125” Wseal™ | … | … | … | … | … | … | BW | … | … | |
| 1.5” c-seal | … | … | … | … | … | … | BM | … | … | |
| 1.5” Wseal™ | … | … | … | … | … | … | BF | … | … | |
| Gas | Type of gas | … | … | … | … | … | … | … | N2 | … |
| Flow | Flow range of gas (sccm or slm) | … | … | … | … | … | … | … | … | … |
| Single-Gas Example | FC- | PA | R | 7800 | C | 4V | N2 | 200 | ||
| (MFC with 9-pin D connector, RoHS compliant, normally-closed valve, 1/4” VCR^TM compatible fittings, N2 gas, 200 sccm full-scale range) | ||||||||||
| Multi-Gas/Multi-Range | Configuration for MGMR functioning (see Full-Scale Ranges above for details for multi-gas models 1 through 8) | … | … | … | … | … | … | … | … | Multi -1 to -8 (10 sccm to 30 slm) |
| N2 equivalent | ||||||||||
| Multi-Gas Example | FC- | PA | R | 7800 | C | 4V | MULTI – 3 | |||
| (MFC with 9-pin D connector, RoHS compliant, normally-closed valve, 1/4” VCR^TM compatible fittings, 101 to 300 sccm full-scale range) | ||||||||||
- ※1 Three-digit flow range suffix codes are for DN Series models; Three-digit and four-digit flow range suffix codes are for available for PA Series models. Consult factory for details.
- ※2 Electronic options “T” and “Y” are available only for compact 785 and 786 Series.
■ Mass Flow Meters
| Category | Description | Suffix Codes | |||||||
|---|---|---|---|---|---|---|---|---|---|
| Product Type | Mass flow meter | FM- | … | … | … | … | … | … | … |
| Connector Type | DeviceNet™ | … | DN | … | … | … | … | … | … |
| 9-pin D | … | PA | … | … | … | … | … | … | |
| RoHS Compliance | Compliant with RoHS directives | … | … | R | … | … | … | … | … |
| Full-Scale Flow Range※1 | 10 sccm to 5 slm | … | … | … | 860 | … | … | … | … |
| … | … | … | 8600 | … | … | … | … | ||
| … | … | … | 865 | … | … | … | … | ||
| … | … | … | 8650 | … | … | … | … | ||
| 5 to 50 slm | … | … | … | 861 | … | … | … | … | |
| … | … | … | 8610 | … | … | … | … | ||
| … | … | … | 866 | … | … | … | … | ||
| … | … | … | 8660 | … | … | … | … | ||
| 50 to 400 slm | … | … | … | 862 | … | … | … | … | |
| … | … | … | 8620 | … | … | … | … | ||
| Connector※2 | Top mounted connector | … | … | … | … | T | … | … | … |
| Side mounted pigtail connector | … | … | … | … | Y | … | … | … | |
| Fittings | 1/4” VCR™ compatible | … | … | … | … | … | 4V | … | … |
| 3/8″ VCR™ compatible (862x Series only) | … | … | … | … | … | 6V | … | … | |
| 1.125” c-seal | … | … | … | … | … | BA | … | … | |
| 1.125” Wseal™ | … | … | … | … | … | BW | … | … | |
| 1.5” c-seal | … | … | … | … | … | BM | … | … | |
| 1.5” Wseal™ | … | … | … | … | … | BF | … | … | |
| Gas | Type of gas | … | … | … | … | … | … | N2 | … |
| Flow | Flow range of gas (sccm or slm) | … | … | … | … | … | … | … | … |
| Example | FM- | PA | R | 8600 | T | 4V | N2 | 200 | |
| (MFM with 9-pin D connector, RoHS compliant, top-mounted connector, 1/4” VCR^TM compatible fittings, N2 gas, 200 sccm full-scale range) | |||||||||
- ※1 Three-digit flow range suffix codes are for DN Series models; Three-digit and four-digit flow range suffix codes are for available for PA Series models. Consult factory for details.
- ※2 Electronic options “T” and “Y” are available only for compact 865 and 866 Series.
Electrical Connections
| 9-Pin D | |
|---|---|
| 1 | VALVE OPEN/CLOSE* |
| 2 | OUTPUT (0 TO 5 VDC) |
| 3 | POWER +15 VDC |
| 4 | POWER COMMON (VALVE RETURN) |
| 5 | -15 VDC |
| 6 | CONTROL (0 TO 5 VDC) |
| 7 | SIGNAL COMMON |
| 8 | SIGNAL COMMON |
| 9 | 9 VALVE TEST POINT (0 TO +4 VDC) |
| DeviceNet^TM | |
|---|---|
| 1 | DRAIN |
| 2 | V+ |
| 3 | V |
| 4 | CAN_H |
| 5 | CAN_L |
Dimensions
■ Models with VCR^TM Compatible Fittings
| 780x, 781x, 860x, 861x Series | 785x, 786x, 865x, 866x Series | 782x Series | |
|---|---|---|---|
| A | 12.7 mm (0.5”) | 12.7 mm (0.5”) | 15.0 mm (0.6”) |
| B | 83.0 mm (3.3”) | 65.0 mm (2.6”) | 115 mm (4.5”) |
| C | 124.0 mm (4.9”) | 106.0 mm (4.2”) | 192.3 mm (7.8”) |
| D | 18.0 mm (0.7”) | 16.3 mm (0.6”) | 25.5 mm (1.0”) |
| E | 69.0 mm (2.7”) | 29.0 mm (1.1”) | 90.0 mm (3.5”) |
| F | 127.0 mm (5.0”) | 127.0 mm (5.0”) | 150.0 mm (5.9”) |
| G | 132.0 mm (5.2”) | 132.0 mm (5.2”) | 154.0 mm (6.1”) |
| H | 28.6 mm (1.1”) | 30.2 mm (1.2”) | 38.0 mm (1.5”) |
| I | 7.0 mm (0.3”) | 16.0 mm (0.6”) | 24.4 mm (0.96”) |
■ Models with IGS^TM Compatible Fittings
| 780x, 781x, 860x, 861x Series | 785x, 786x, 865x, 866x Series | |||
|---|---|---|---|---|
| 1.125” IGS^TM Fittings | 1.5” IGS^TM Fittings</strong | 1.125” IGS^TM Fittings | s 1.5” IGS^TM Fittings</strong | |
| A | 70.4 mm (2.8”) | 70.4 mm (2.8”) | 70.4 mm (2.8”) | 70.4 mm (2.8”) |
| B | 127.0 mm (5.0”) | 127.0 mm (5.0”) | 127.0 mm (5.0”) | 127.0 mm (5.0”) |
| C | 25.4 mm (1.0”) | 25.4 mm (1.0”) | 25.4 mm (1.0”) | 25.4 mm (1.0”) |
| D | 105.0 mm (4.1”) | 105.0 mm (4.1”) | 92.8 mm (3.6”) | 92.8 mm (3.6”) |
| E | 28.6 mm (1.1”) | 38.1 mm (1.5”) | 28.6 mm (1.1”) | 28.6 mm (1.1”) |
| F | 21.8 mm (0.9”) | 30.0 mm (1.2”) | 21.8 mm (0.9”) | 30.0 mm (1.2”) |
| G | 92.0 mm (3.6”) | 92.0 mm (3.6”) | 79.8 mm (3.2”) | 79.8 mm (3.2”) |
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