Kuwana Metals SAM 1480G / 2480G Series Mass Flow Controller

Manufacturer: Kuwana Metals, Ltd.
Model : SAM 1480G / 2480G Series

Table of Models and Functions

Model name	Function			Connection specifications	Communication specifications
	Standard	Optional		Wseal™ Cseal UJR	RS232C RS485 DeviceNet™
	MG/MR function (Guaranteed accuracy with the actual gas)	PI function	LCD display unit	Wseal™ Cseal UJR	RS232C RS485 DeviceNet™
1480FX 2480FX	＊			MG / MR
1480G1 2480G1	＊	＊	＊	MG / MR + PI

1480G1 / 2480G1 series

For both the 1.5″ and 1.125″IGS™, PI Mass Flow Controllers

Dimensions

Item			*Specifications 1**
Model name			SFC1480FX SFC2480FX	SFC1481FX SFC2481FX	SFC1482FX SFC2482FX	SFC1483FX SFC2483FX
Standard full scale flow rate (N2 equivalent)			2SCCM ~5,500SCCM	~11SLM	~30SLM	~50SLM
Function			Multi-gas/multi-range
Valve operation			Normally closed / normally open
Flow rate control range			2~100% F.S.
Operation pressure *2	Inlet pressure		0.05~0.3 MPa (G) 7.3~43.5 PSI (G)		0.1~0.3 MPa (G) 14.5~43.5 PSI (G)	0.2~0.3 MPa (G) 29.0~43.5 PSI (G)
Operation pressure *2	Outlet pressure		Vacuum to ambient pressure
Proof pressure			1.0 MPa (G) 145 PSI (G)
Temperature	Operation		5~50 ºC
	Accuracy guaranteed		15~35 ºC
	Heating temperature when not powered		65ºC max
Humidity			35~80%RH (non condensing)
Installation position			Horizontal, Vertical	Horizontal, Vertical (option)
Flow rate setting signal			0.1 to 5 VDC (absolute rating: Max. ±15 VDC)
Flow rate output signal			0 to 5 VDC (maximum output: ±15 VDC)
Required power			+15 VDC ±4%, 140 mA max -15 VDC ±4%, 140 mA max
Material of gas wetted surface	Housing, flange, valve seat		SUS316L
	Diaphragm		Ni-Co alloy
	Flow sensor		SUS316L		Ni
	Seal *4		SUS316L
	Pressure sensor		SUS316L
Surface finish of components that contact the gas			Specially electro-polished (standard)
Fitting			Wseal™, Cseal, 1/4” UJR male
LCD display unit			4 digit display (6 x 4 mm), LED backlight
External leakage standard			Max. 1×10^-11 Pa•m3/s (He)
Accuracy	N2 gas	10~100%	± (0.5% S.P. + 0.15% F.S.)
	N2 gas	2~10%	±0.2% F.S.
	Actual gas	10~100%	± (1.5% S.P. + 0.35% F.S.)
	Actual gas	2~10%	±0.5% F.S.
Linearity	N2 gas		±0.3% F.S
Linearity	Actual gas		±1.0% F.S
Repeatability	10~100%		± (0.1% S.P. + 0.05% F.S.)
Repeatability	2~10%		±0.06% F.S.
Flow rate sensor guaranteed zero point deviation range			±0.5% F.S. / year, max.
Temperature dependence	Zero point		±0.01% F.S. / ºC (15~35 ºC)
Temperature dependence	Span		±0.01% S.P. / ºC (15~35 ºC)
Response Time	0% → (20~100%)		Max. 1.0 sec. to reach ±2% S.P of the set value
Response Time	0% → (2~20%)		Max. 1.5 sec. to reach ±0.4% S.P of the set value.
Flow rate fluctuation width during pressure variations	Pressure gradient: ＜0.5kPa 0.1PSI/0.12sec		±1.0% S.P.
	Pressure gradient: ＞0.5kPa 0.1PSI/0.12sec	Pressure fluctuation width ＜0.02MPa 2.9PSI	± (1.5% S.P. + 1.0%F.S.)
	Pressure gradient: ＞0.5kPa 0.1PSI/0.12sec	Pressure fluctuation width 0.02~0.05MPa 2.9~7.3PSI	± (3.0% S.P. + 1.0% F.S.)
Flow rate change time when the pressure changes			Within 1 second of the pressure fluctuation
Pressure senso	Pressure range		-99.9~999.9 kPa (G) -14.5~145 PSI (G)
	Accuracy		±0.5% F.S.
	Repeatability		±0.01% F.S.
	Temperature dependence		0.05% / ºC
	Pressure output		LCD display and digital communication (no analog output)
Temperature measuring range			273.2~323.2 K (0~50 ºC)

*1: The specifications above are guaranteed values when the MFC was measured by itself in standard conditions. The MFC may not meet the specifications above,
depending on the measurement conditions.
*2: The 147*G1 / 247*G1 series are also available for use with minute pressure differences. Please inquire separately for the specifications of our minute pressure
difference models.
*3: A model using a rubber seal is also available. Please inquire separately about the rubber seal specifications.
*4: The PI function may not perform as specified in certain plumbing conditions.

1480G1-D / 2480G1-D series

DeviceNet™ communication type For both the 1.5″ and 1.125″IGS™, PI Mass Flow Controllers

Dimensions

Item			*Specifications 1**
Model name			1480G1-D0 2480G1-D0	1481G1-D0 2481G1-D0	1482G1-D0 2482G1-D0	1483G1-D0 2483G1-D0
Standard full scale flow rate (N2 equivalent)			2SCCM ~5,500SCCM	11SLM	30SLM	50SLM
Function			1) Multi-gas/multi-range, 2) PI function, 3) LCD display (flow rate output, flow rate setting, pressure, and temperature)
Valve operation			Normally closed / normally open
Flow rate control range			2~100% F.S.
Operation pressure *2	Inlet pressure		0.05~0.3 MPa (G) 7.3~43.5 PSI (G)		0.1~0.3 MPa (G) 14.5~43.5 PSI (G)	0.2~0.3 MPa (G) 29.0~43.5 PSI (G)
Operation pressure *2	Outlet pressure		Vacuum to ambient pressure
Proof pressure			1.0 MPa (G) 145 PSI (G)
Temperature	Operation		5~50 ºC
	Accuracy guaranteed		15~35 ºC
	Heating temperature when not powered		65ºC max
Humidity			35~80%RH (non condensing)
Installation position			Horizontal, Vertical	Horizontal, Vertical (option)
Flow rate setting signal			DeviceNet™ communication *3
Flow rate output signal			DeviceNet™ communication *3
Required power			+24 VDC, 0.3 A max
Material of gas wetted surface	Housing, flange, valve seat		SUS316L
	Diaphragm		Ni-Co alloy
	Flow sensor		SUS316L		Ni
	Seal *4		SUS316L
	Pressure sensor		SUS316L
Surface finish of components that contact the gas			Specially electro-polished (standard)
Fitting			Wseal™, Cseal, 1/4” UJR male
LCD display unit			4 digit display (6 x 4 mm), LED backlight
External leakage standard			Max. 1×10^-11 Pa•m3/s (He)
Accuracy	N2 gas	10~100%	± (0.5% S.P. + 0.15% F.S.)
	N2 gas	2~10%	±0.2% F.S.
	Actual gas	10~100%	± (1.5% S.P. + 0.35% F.S.)
	Actual gas	2~10%	±0.5% F.S.
Linearity	N2 gas		±0.3% F.S
Linearity	Actual gas		±1.0% F.S
Repeatability	10~100%		± (0.1% S.P. + 0.05% F.S.)
Repeatability	2~10%		±0.06% F.S.
Flow rate sensor guaranteed zero point deviation range			±0.5% F.S. / year, max.
Temperature dependence	Zero point		±0.01% F.S. / ºC (15~35 ºC)
Temperature dependence	Span		±0.01% S.P. / ºC (15~35 ºC)
Response Time	0% → (20~100%)		Max. 1.0 sec. to reach ±2% S.P of the set value
Response Time	0% → (2~20%)		Max. 1.5 sec. to reach ±0.4% S.P of the set value.
Flow rate fluctuation width during pressure variations	Pressure gradient: ＜0.5kPa 0.1PSI/0.12sec		±1.0% S.P.
	Pressure gradient: ＞0.5kPa 0.1PSI/0.12sec	Pressure fluctuation width ＜0.02MPa 2.9PSI	± (1.5% S.P. + 1.0%F.S.)
	Pressure gradient: ＞0.5kPa 0.1PSI/0.12sec	Pressure fluctuation width 0.02~0.05MPa 2.9~7.3PSI	± (3.0% S.P. + 1.0% F.S.)
Flow rate change time when the pressure changes			Within 1 second of the pressure fluctuation
Pressure senso	Pressure range		-99.9~999.9 kPa (G) -14.5~145 PSI (G)
	Accuracy		±0.5% F.S.
	Repeatability		±0.01% F.S.
	Temperature dependence		0.05% / ºC
	Pressure output		LCD display and digital communication (not analog output)
Temperature measuring range			273.2~323.2 K (0~50 ºC)

*1: The specifications above are guaranteed values when the MFC was measured by itself in our standard conditions. The MFC may not meet the specifications above, depending on the
measurement conditions.
*2: The 147*G1-D / 247*G1-D series are also available for use with minute pressure differences. Please inquire separately for the specifications of our minute pressure difference
models.
*3: For details about DeviceNet™ communication, see page 10.
*4: A model using a rubber seal is also available. Please inquire separately about the rubber seal specifications.
*5: The PI function may not perform its specifications depending on each plumbing condition.