Kuwana Metals SAM PS200 Series Pressure-Based PI Mass Flow Controller

Manufacturer: Kuwana Metals, Ltd.
Model : SAM PS200 Series

Features

Pressure-based flow measurement architecture
Improved Pressure Insensitive function
Valiant repeatability
Self-diagnostic function

Electrical Connection

Analog model 9 Pin D-sub male type (M3 screw)

1	VALVE OPEN / CLOSE Connect to +15 V: OPEN Connect to -15 V: CLOSE
2	OUTPUT (0 – 5 VDC / 0 – 100 %F.S.)
3	INPUT POWER (+15 VDC)
4	POWER COMMON
5	INPUT POWER (-15 VDC)
6	SET POINT INPUT (0 – 5 VDC / 0 – 100 % F.S.)
7	SIGNAL COMMON
8	SIGNAL COMMON
9	VALVE VOLTAGE OUTPUT (0 – 4V / 0 – 100 %)

RS-485 model 9 Pin D-sub male type (M3 screw)

1	NA
2	NA
3	INPUT POWER (+15 VDC)
4	POWER COMMON
5	INPUT POWER (-15 VDC)
6	NA
7	SIGNAL COMMON
8	RS-485+
9	RS-485-

DeviceNet™ model CM02-8DR5P-CF (D5) DDK

1	SHIELD
2	INPUT POWER (+11 – 25 VDC)
3	GND(-)
4	CAN(H)
5	CAN(L)

EtherCAT® model (Power connector) XS3M-M524-201 OMRON

1	+24VDC
2	FG
3	POWER COMMON (0V)

EtherCAT® model (Communication connector) Cat.5 RJ45 Ethernet connector

Category 5 networking Ethernet cable is used.

Dimensions

1.125” IGS™ fitting

Specifications ※ 1

Items	Normal pressure type	Low vapor pressure type (C4F6, C4F8 or similar gas)
Full-Scale Range (N2 equivalent flow)	From 5 SCCM to 5 SLM (Multi-0~10)
Flow Sensing	Measurement of the differential pressure
Flow Calibration	Multi Gas, Multi Range (11 BINs)
Settling Time (SEMITM E17-91)※2	< 0.8s (< 0.6s (typical))
Accuracy (N2)※3	< ±1% S.P. (10–100%), < ±0.1% F.S. (2-10%)
Linearity	< ±0.5% F.S
Repeatability	< ±0.25% S.P. (20-100%), < ±0.05%F.S. (2-20%)
Leak Integrity	< 1×10-11Pa・m3/s (He)
Flow Control range※4	0.5–100% F.S.
Operating Pressure Range (Inlet)	230-700kPa (abs)	140-700kPa (abs)
Operating Pressure Range (Outlet)	Vacuum-80kPa (abs)	Vacuum-60kPa (abs)
Leak Across Valve	<0.5% F.S., <0.1% F.S. (in case that the full-scale is set for each BIN)
Proof Pressure	1.0MPaG
Ambient Temp. Range	15-50 ºC [Gas temperature needs to be equal to ambient temperature.]
Accuracy of the internal pressure sensor	< ±5kPa [0-700kPa (abs)]
Accuracy of the internal temperature sensor	<< ±1 ºC [15–50 ºC]
Control Valve Type	Normally-Closed Piezo Actuator
Materials for external seals	316L S.S
Materials for gas wetted	316L S.S., PCTFE, Ni-Co alloy
Fittings	92mm 1.125” Cseal, 92mm 1.125” WsealTM
Surface Finish	Electro-polished (fitting, sensor, base) Ra=0.2μm, machine finish Ra=0.8μm
Orientation	Any position
Mass	1.1kg
Special function	Pressure Insensitive function microSDTM card, LCD Display to monitor the various parameter
Signal interface	Analog, Digital (RS485, DeviceNetTM, EtherCAT®)
Connector type	Analog : 9Pin D-sub Digital : RS485, DeviceNetTM, EtherCAT® Maintenance : RS485/Φ2.5 3-pole round connector (for all model)
Input power	Analog : +15VDC ±4% 90mA, -15VDC ±4% 60mA DeviceNetTM : +11VDC 500mA – +25VDC 230mA EtherCAT® : +24VDC ±10% 120mA
Flow set signal (Analog model only)	0–5VDC / 0–100%F.S. input impedance > 1MΩ
Flow out signal (Analog model only)	0–5VDC / 0–100%F.S. load impedance > 2kΩ (required)

※1. This specification is defined based on our standard test condition with single MFC. The performance with the different condition may not satisfy
this specification, and we do not guarantee this specification under the condition with all combination of the configuration.
※2. From 0% to 5%S.P. or greater, ambient temperature is 22ºC (Min. 15ºC, Max. 50ºC)
※3. Digital mode, ambient temperature is 22ºC (Min. 15ºC, Max. 50ºC, Only when the temperature changes within ±3°C
after zero point adjustment is performed in the ambient temperature.)
※4. Valve closes if the set point applies less than 0.5%F.S.
SCCM, SLM are the unit indicates the gas flow-rate as mL/min, L/min at 0ºC, 101.3kPa (abs) condition.
F.S. = full scale, S.P. = set point

PS200 series model and the suffix codes

Category	Description		Suffix Codes
Model	Measurement of the differential pressure	PS200
Interface	Analog (9Pin D-sub)		A
	DeviceNet™		D
	L Protocol RS-485 (9 Pin D-sub)		L
	EtherCAT®		E
Connector location	Top L Protocol (RS-485) model is excluded.			T
Connector location	Inlet side			U
External Seals	Metal seal				M
Valve Type	Normally-closed					C
Fitting	92mm 1.125″ Wseal™						BW1
Fitting	92mm 1.125″ Cseal						BA1
Fixed Code								0
Optional Code									NNN
Full Scale Range	5 to 12 SCCM									Multi-0
	13 to 20 SCCM									Multi-1
	21 to 40 SCCM									Multi-2
	41 to 60 SCCM									Multi-3
	61 to 100 SCCM									Multi-4
	101 to 200 SCCM									Multi-5
	201 to 300 SCCM									Multi-6
	301 to 500 SCCM									Multi-7
	501 to 1000 SCCM									Multi-8
	1001 to 2500 SCCM									Multi-9
	1001 to 2500 SCCM									Multi-9
	2501 to 5000 SCCM									Multi-10
Example	PS200ATMCBA10NNN Multi-5
Example	Pressure-based MFC, Analog control, Top connector, 9Pin D-sub connector, metal seal, Normally closed piezo valve, 1.125” 92mm Cseal, no option, Full scale 200SCCM